Preparation of a Contact System with a Single-Oriented (111)Al Overlayer by Interposing a Thin ZrN/Zr Bilayered Barrier Applicable to Sub-0.25-μm Design Rule
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概要
- 論文の詳細を見る
- 2001-06-01
著者
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Miyake H
Kitami Inst. Technol. Kitami Jpn
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Miyake Hidekazu
Pharmacobioregulation Research Laboratory Taiho Pharmaceutical Co. Ltd.
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Yanagisawa H
Nhk Sci. And Technical Res. Lab. Tokyo Jpn
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Yanagisawa H
Kitami Inst. Technol. Kitami Jpn
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ABE Yoshio
Department of Materials Science, Kitami Institute of Technology
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SASAKI Katsutaka
Department of Materials Science, Kitami Institute of Technology
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SHINKAI Satoko
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology
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YANAGISAWA Hideto
Department of Electrical and Electronic Engineering, Faculty of Engineering, Kitami Institute of Tec
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Shinkai Satoko
Research Fellow Of The Japan Society For The Promotion Of Science
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MIYAKE Hidekazu
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology
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