Capacitor Property and Leakage Current Mechanism of ZrO_2 Thin Dielectric Films Prepared by Anodic Oxidation
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-07-15
著者
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佐々木 克孝
Department Of Materials Science Kitami Institute Of Technology
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阿部 良夫
Department Of Materials Science Kitami Institute Of Technology
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ABE Yoshio
Department of Materials Science, Kitami Institute of Technology
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SASAKI Katsutaka
Department of Materials Science, Kitami Institute of Technology
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SHINKAI Satoko
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology
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KAMIJYO Masahiro
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology
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ONOZUKA Tomotake
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology
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YAMANE Misao
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology
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Shinkai Satoko
Research Fellow Of The Japan Society For The Promotion Of Science
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Onozuka Tomotake
Department Of Materials Science Faculty Of Engineering Kitami Institute Of Technology
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