Electrical Properties of a Thin Anodized Capacitor Made of Y-Doped Al Alloy Film
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概要
- 論文の詳細を見る
We have prepared an Al–Y anodized capacitor using sputter-deposited Al–Y alloy film with 5 at. % Y atoms, and evaluated the capacitor properties and the leakage current properties before and after heat treatment. In addition, the characterization of Al–Y anodized films was examined by X-ray diffraction, Auger electron spectroscopy (AES), and X-ray photoelectron spectroscopy analyses. As a result, it is revealed that the thermal stability of an Al–Y anodized capacitor is superior to that of a pure Al anodized capacitor because of its excellent passive nature, and the loss properties can be improved by increasing the heat treatment temperature in air because of the reduction of the equivalent series resistance. Furthermore, it is clarified that the cause of the short-circuited state observed at 550°C is the formation of a narrow capillary-like conduction path of metallic Al atoms as a result of the interdiffusion of Al.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-09-15
著者
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Shinkai Satoko
Department Of Materials Science Faculty Of Engineering Kitami Institute Of Technology
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Yamane Misao
Department Of Materials Science Faculty Of Engineering Kitami Institute Of Technology
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Onozuka Tomotake
Department Of Materials Science Faculty Of Engineering Kitami Institute Of Technology
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Abe Yoshio
Department Of Materials Science Faculty Of Engineering Kitami Institute Of Technology
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Sasaki Katsutaka
Department Of Electrical And Electronic Engineering Faculty Of Engineering Kitami Institute Of Techn
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Sasaki Hayato
Department Of Orthopedic Surgery Sanyudo Hospital
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Onozuka Tomotake
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology, 165 Koen-cho, Kitami, Hokkaido 090-8507, Japan
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Mikuni Naohiro
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology, 165 Koen-cho, Kitami, Hokkaido 090-8507, Japan
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Abe Yoshio
Department of Materials Science and Engineering, Faculty of Engineering, Kitami Institute of Technology, 165 Koen-cho, Kitami, Hokkaido 090-8507, Japan
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Yamane Misao
Department of Materials Science and Engineering, Faculty of Engineering, Kitami Institute of Technology, 165 Koen-cho, Kitami, Hokkaido 090-8507, Japan
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Shinkai Satoko
Department of Control Engineering, Takuma National College of Technology, 551 Koda, Takuma-cho, Kagawa 769-1192, Japan
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Sasaki Hayato
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology, 165 Koen-cho, Kitami, Hokkaido 090-8507, Japan
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