Ni Oxyhydroxide Thin Films Prepared by Reactive Sputtering Using $\text{O$_{2}$} + \text{H$_{2}$O}$ Mixed Gas
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概要
- 論文の詳細を見る
In this study, we have examined the preparation of thin films of Ni oxyhydroxide, which are used for batteries, supercapacitors, and electrochromic devices, by reactive sputtering. Transmittance and resistivity were found to decrease with the incorporation of H2O into the sputtering gas. This indicates that the valence state of Ni atoms in the film changes from Ni2+ to Ni3+. Peaks due to Ni–OH and hydrogen bonded OH were observed by Fourier transform IR (FTIR) spectroscopy of the films sputtered in $\text{O$_{2}$} + \text{H$_{2}$O}$ mixed gas. From the obtained results, it is confirmed that Ni oxyhydroxide films are formed by reactive sputtering in $\text{O$_{2}$} + \text{H$_{2}$O}$ mixed gas. An electrochromic coloration efficiency of 29 cm2/C was obtained in 1 M KOH aqueous electrolyte solution for the Ni oxyhydroxide films.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2009-01-25
著者
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KATO Kiyohiko
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology
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Sasaki Katsutaka
Department Of Electrical And Electronic Engineering Faculty Of Engineering Kitami Institute Of Techn
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Kawamura Midori
Department Of Materials Science Faculty Of Engineering Kitami Institute Of Technology
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Itoh Hidenobu
Department Of Materials Science And Engineering Kitami Institute Of Technology
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Abe Yoshio
Department of Materials Science, Kitami Institute of Technology, Kitami, Hokkaido 090-8507, Japan
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Abe Yoshio
Department of Materials Science and Engineering, Faculty of Engineering, Kitami Institute of Technology, 165 Koen-cho, Kitami, Hokkaido 090-8507, Japan
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Ueta Hideaki
Department of Materials Science, Kitami Institute of Technology, Kitami, Hokkaido 090-8507, Japan
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Kato Kiyohiko
Department of Materials Science, Kitami Institute of Technology, Kitami, Hokkaido 090-8507, Japan
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Ueta Hideaki
Department of Materials Science and Engineering, Kitami Institute of Technology, Kitami, Hokkaido 090-8507, Japan
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Kawamura Midori
Department of Materials Science, Kitami Institute of Technology, Kitami, Hokkaido 090-8507, Japan
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Kawamura Midori
Department of Materials Science and Engineering, Kitami Institute of Technology, Kitami, Hokkaido 090-8507, Japan
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