Sasaki Katsutaka | Department Of Electrical And Electronic Engineering Faculty Of Engineering Kitami Institute Of Techn
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概要
- 同名の論文著者
- Department Of Electrical And Electronic Engineering Faculty Of Engineering Kitami Institute Of Technの論文著者
関連著者
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Sasaki Katsutaka
Department Of Electrical And Electronic Engineering Faculty Of Engineering Kitami Institute Of Techn
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Abe Yoshio
Department of Materials Science and Engineering, Faculty of Engineering, Kitami Institute of Technology, 165 Koen-cho, Kitami, Hokkaido 090-8507, Japan
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SASAKI Katsutaka
Department of Materials Science, Kitami Institute of Technology
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Abe Yoshio
Department Of Materials Science Faculty Of Engineering Kitami Institute Of Technology
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Yanagisawa Hideto
Department Of Electrical And Electronic Engineering Kitami Institute Of Technology
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ABE Yoshio
Department of Materials Science, Kitami Institute of Technology
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阿部 良夫
Department Of Materials Science Kitami Institute Of Technology
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Abe Yuji
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Abe Y
Mitsubishi Electric Corp. Hyogo Jpn
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Shinkai Satoko
Department Of Materials Science Faculty Of Engineering Kitami Institute Of Technology
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Kawamura Midori
Department of Materials Science and Engineering, Kitami Institute of Technology, Kitami, Hokkaido 090-8507, Japan
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Shinkai Satoko
Department of Control Engineering, Takuma National College of Technology, 551 Koda, Takuma-cho, Kagawa 769-1192, Japan
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Kawamura Midori
Department Of Materials Science Faculty Of Engineering Kitami Institute Of Technology
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Noya Atsushi
Department Of Electrical And Electronic Engineering Faculty Of Engineering Kitami Institute Of Techn
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笹木 敬司
北海道大学電子科学研究所
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SHINKAI Satoko
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology
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YANAGISAWA Hideto
Department of Electrical and Electronic Engineering, Faculty of Engineering, Kitami Institute of Tec
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Yanagisawa H
Nhk Sci. And Technical Res. Lab. Tokyo Jpn
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Yanagisawa H
Kitami Inst. Technol. Kitami Jpn
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Kamijyo Masahiro
Department Of Materials Science Faculty Of Engineering Kitami Institute Of Technology
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Shinkai S
Department Of Materials Science Faculty Of Engineering Kitami Institute Of Technology
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Shinkai Satoko
Research Fellow Of The Japan Society For The Promotion Of Science
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川村 みどり
Department Of Materials Science Kitami Institute Of Technology
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KAWAMURA Midori
Department of Materials Science, Kitami Institute of Technology
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Takeyama M
Kitami Inst. Technol. Kitami Jpn
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Takeyama Mayumi
Department Of Electrical And Electronic Engineering Faculty Of Engineering Kitami Institute Of Techn
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佐々木 克孝
Department Of Materials Science Kitami Institute Of Technology
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KATO Kiyohiko
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology
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Sasaki Kimihiro
Graduate School Of Natural Science And Technology Kanazawa University
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Sasaki Koh
Institute For Materials Research Tohoku University
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Yamane Misao
Department of Materials Science and Engineering, Faculty of Engineering, Kitami Institute of Technology, 165 Koen-cho, Kitami, Hokkaido 090-8507, Japan
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Sasaki K
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Abe Yoichi
Department Of Applied Science Tokyo Electrical Engineering College
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Itoh Hidenobu
Department Of Materials Science And Engineering Kitami Institute Of Technology
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Shinkai Satoko
Center for Microelectronic System, Kyushu Institute of Technology, 680-4 Kawazu, Iizuka, Fukuoka 820-8502, Japan
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NOYA Atsushi
Department of Electrical and Electronic Engineering, Faculty of Engineering, Kitami Institute of Tec
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Yamane Misao
Department Of Materials Science Faculty Of Engineering Kitami Institute Of Technology
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Miyake Hidekazu
Department Of Materials Science Faculty Of Engineering Kitami Institute Of Technology
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Miyake H
Kitami Inst. Technol. Kitami Jpn
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Miyake Hidekazu
Pharmacobioregulation Research Laboratory Taiho Pharmaceutical Co. Ltd.
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KAGA Yukinao
Department of Materials Science, .Faculty of Engineering, Kitami Institute of Technology
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MIYAKE Hidekazu
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology
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Onozuka Tomotake
Department Of Materials Science Faculty Of Engineering Kitami Institute Of Technology
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Kaga Yukinao
Department Of Materials Science .faculty Of Engineering Kitami Institute Of Technology
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UMEZAWA Tomokazu
Faculty of Science and Technology,Keio University
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Yoshimoto Ken-ichi
Department Of Electrical Engineering Asahikawa National College Of Technology
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UMEZAWA Toshiji
Department of Electronic Engineering, Faculcy of Engineering, Kitami Institute of Technology
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Umezawa T
Teijin Ltd. Hiroshima Jpn
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Ishikawa Takeshi
Department Of Chemistry And Materials Engineering Faculty Of Chemistry Materials And Bioengineering
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Abe Yoshio
Department of Materials Science and Engineering, Kitami Institute of Technology, Koen-cho, Kitami, Hokkaido 090-8507, Japan
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Shinkai Satoko
Center for Microelectronic System, Kyusyu Institute of Technology, 680-4 Kawazu, Iizuka, Fukuoka 820-8502, Japan
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Yoshimoto Ken-ichi
Department of Electrical and Computer Engineering, Asahikawa National College of Technology, 2-2 Shunkodai, Asahikawa, Hokkaido 071-8142, Japan
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ISHIKAWA TAKESHI
Department of Chemical Engineering, Faculty of Engineering, Tokyo Metropolitan University
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ISHIKAWA Takeshi
Department of Pediatrics, Iwate Medical College
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HIRAGA Kenji
Institute for Materials Research, Tohoku University
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KAMIJYO Masahiro
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology
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YAMANE Misao
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology
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YOSHIMOTO Ken-ichi
Department of Electrical Engineering, Asahikawa National College of Technology
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Hiraga K
Institute For Materials Research Tohoku University
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Hiraga Kenji
Institute For Materials Research
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Yamane M
Tokyo Inst. Technol. Tokyo Jpn
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Sasaki Katsutaka
Department Of Electronic Engineering Faculty Of Engineering Kitami Institute Of Technology
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Aoyagi E
Tohoku Univ. Sendai Jpn
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Aoyagi Eiji
Institute For Materials Research Tohoku University
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Kato K
Department Of Materials Science Faculty Of Engineering Kitami Institute Of Technology
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Ishikawa Takeshi
Department Of Food And Nutritional Sciences And Global Center Of Excellence (coe) Program University
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Kato Kazumi
National Institute Of Advanced Industrial Science And Technology
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Suzuki Tsutomu
Department Of Applied And Environmental Chemistry Kitami Institute Of Technology
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Mikuni Naohiro
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology, 165 Koen-cho, Kitami, Hokkaido 090-8507, Japan
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Abe Yoshio
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology, 165 Koen-cho, Kitami, Hokkaido 090-8507, Japan
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Ueta Hideaki
Department of Materials Science and Engineering, Kitami Institute of Technology, Kitami, Hokkaido 090-8507, Japan
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Kawamura Midori
Department of Materials Science, Kitami Institute of Technology, Kitami, Hokkaido 090-8507, Japan
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Shibata Tomoharu
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology, 165 Koen-cho, Kitami, Hokkaido 090-8507, Japan
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Kimizaki Hidefumi
Department of Materials Science and Engineering, Faculty of Engineering, Kitami Institute of Technology, 165 Koen-cho, Kitami, Hokkaido 090-8507, Japan
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NOMURA Kouichi
Department of Pathology, The Jikei University School of Medicine
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YOSHIDA Naoto
Department of Biochemistry and Applied Biosciences, Faculty of Agriculture, Miyazaki University
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Seki H
Ibm Almaden Res. Center Ca Usa
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Yoshida Naoto
Department Of Biochemistry And Applied Biosciences Faculty Of Agriculture Miyazaki University
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Zaima Shigeaki
Department Of Crystalline Materials Science Graduate School Of Engineering Nagoya University
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Seki Hikaru
Department Of Electrical And Electronic Engineering Faculty Of Engineering Kitami Institute Of Techn
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ITADANI Naruhiro
Department of Materials Science, Kitami Institute of Technology
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MIREBA Kazuhiro
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology
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ONOZUKA Tomotake
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology
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SHIOJIRI Masayuki
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology
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TAKEYAMA Mayumi
Department of Electrical and Electronic Engineering, Faculty of Engineering, Kitami Institute of Tec
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SAKANISHI Kouichirou
Department of Electrical and Electronic Engineering, Faculty of Engineering, Kitami Institute of Tec
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Shinkai Satoko
Department Of Materials Science Faculty Of Engineering Kitami Institute Of Technology:research Fello
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Shinkai Satoko
Department Of Materials Science Faculty Of Engineering. Kitami Institute Of Technology
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KITADA Yasuhiro
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology
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Yan Jiwang
Department Of Mechanical Engineering Faculty Of Engineering Kitami Institute Of Technology
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阿部 良夫
北見工業大学マテリアル工学科
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Noya Atsushi
Department Of Electronic Engineering Faculty Of Engineering Kitami Institute Of Tecknology
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Maekawa Kouki
Department Of Mechanical Engineering Faculty Of Engineering Kitami Institute Of Technology
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Nomura Kouichi
Department Of Electrical And Electronic Engineering Faculty Of Engineering Kitami Institute Of Techn
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Obata Takeshi
Department Of Chemistry Graduate School Of Science Tohoku University
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Kitada Yasuhiro
Department Of Materials Science Faculty Of Engineering Kitami Institute Of Technology
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Sasaki Katsutaka
Department Of Materials Science Faculty Of Engineering Kitami Institute Of Technology
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Sasaki Katsutaka
Department Of Electronic Engineering Faculty Of Engineering Kitami Institute Of Tecknology
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Sasaki Katsutaka
Department Of Materials Science Faculty Of Engineering. Kitami Institute Of Technology
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Sasaki Katsutaka
Department Of Materials Science Kitami Institute Of Technology
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Iibuchi Kyouhei
Department Of Materials Science Kitami Institute Of Technology
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Mireba Kazuhiro
Department Of Materials Science Faculty Of Engineering Kitami Institute Of Technology
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SUNAGA Kouji
Department of Electrical and Electronic Engineering, Faculty of Engineering, Kitami Institute of Tec
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Ohtaka Shirou
Department of Electronic Engineering, Faculty of Engineering, Kitami Institute of Tecknology
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Sasao Nobuyuki
Department of Electronic Engineering, Faculty of Engineering, Kitami Institute of Tecknology
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Noya Atsuhi
Department of Electronic Engineering, Faculty of Engineering, Kitami, Institute of Technology
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Sunaga Kouji
Department Of Electrical And Electronic Engineering Faculty Of Engineering Kitami Institute Of Techn
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Ohtaka Shirou
Department Of Electronic Engineering Faculty Of Engineering Kitami Institute Of Tecknology
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Sasao Nobuyuki
Department Of Electronic Engineering Faculty Of Engineering Kitami Institute Of Tecknology
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Taguchi Masahiro
Department Of Molecular Biotechnology Graduate School Of Advanced Sciences Of Matter Hiroshima Unive
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Sasaki Hayato
Department Of Orthopedic Surgery Sanyudo Hospital
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Ichikawa T
Fdk Corp. Shizuoka Jpn
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Ichikawa Takaaki
Department Of Applied Physics Okayama University Of Science
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Li Ning
Department Of Analytical Chemistry Shenyang Pharmaceutical University
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Noya Atsushi
Department Of Electrical And Electronic Engineering Faculty Of Engineering Kitami Institute Of Techn
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Yoshida Naoto
Department Of Applied Biology Faculty Of Textile Science And Technology Shinshu University
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Yoshida Naoto
Department Of Materials Science Faculty Of Engineering Kitami Institute Of Technology
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Noya Atsuhi
Department Of Electronic Engineering Faculty Of Engineering Kitami Institute Of Technology
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Sakanishi Kouichirou
Department Of Electrical And Electronic Engineering Faculty Of Engineering Kitami Institute Of Techn
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Ishikawa Takeshi
Department Of Materials Science Faculty Of Engineering Kitami Institute Of Technology
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Sakai Akira
Department Of Agricultural Chemistry The University Of Tokyo
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Ishikawa Takeshi
Department Of Materials Science Kitami Institute Of Technology
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Kudo Masahiro
Center For Nano Materials And Technology Japan Advanced Institute Of Science And Technology (jaist)
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Taguchi Masahiro
Department Of Electrical And Electronic Engineering Faculty Of Engineering
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Onozuka Tomotake
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology, 165 Koen-cho, Kitami 090-8507, Japan
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Onozuka Tomotake
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology, 165 Koen-cho, Kitami, Hokkaido 090-8507, Japan
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Li Ning
Department of Materials Science and Engineering, Kitami Institute of Technology, Kitami, Hokkaido 090-8507, Japan
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Abe Yoshio
Department of Materials Science, Kitami Institute of Technology, Kitami, Hokkaido 090-8507, Japan
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Abe Yoshio
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology, 165 Koen-cho, Kitami 090-8507, Japan
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Abe Yoshio
Department of Materials Science, Kitami Institute of Technology, Kitami 090-8507, Japan
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Itoh Hidenobu
Department of Materials Science and Engineering, Kitami Institute of Technology, Kitami, Hokkaido 090-8507, Japan
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Ueta Hideaki
Department of Materials Science, Kitami Institute of Technology, Kitami, Hokkaido 090-8507, Japan
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Takisawa Takaya
Department of Materials Science, Kitami Institute of Technology, Kitami, Hokkaido 090-8507, Japan
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Kato Kiyohiko
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology, 165 Koen-cho, Kitami, Hokkaido 090-8507, Japan
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Kato Kiyohiko
Department of Materials Science, Kitami Institute of Technology, Kitami, Hokkaido 090-8507, Japan
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Miyake Hidekazu
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology, 165 Koen-cho, Kitami 090-8507, Japan
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Itadani Naruhiro
Department of Materials Science, Kitami Institute of Technology, Kitami, Hokkaido 090-8507, Japan
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Sakurai Junpei
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology, 165 Koen-cho, Kitami, Hokkaido 090-8507, Japan
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Peng Fei
Department of Materials Science, Kitami Institute of Technology, Kitami, Hokkaido 090-8507, Japan
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Takiguchi Yasuhiro
Department of Materials Science, Kitami Institute of Technology, Kitami, Hokkaido 090-8507, Japan
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Kamijyo Masahiro
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology, 165 Koen-cho, Kitami 090-8507, Japan
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Iibuchi Kyouhei
Department of Materials Science, Kitami Institute of Technology, Kitami 090-8507, Japan
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Kawamura Midori
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology, 165 Koen-cho, Kitami 090-8507, Japan
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Kawamura Midori
Department of Materials Science and Engineering, Kitami Institute of Technology, Koen-cho, Kitami, Hokkaido 090-8507, Japan
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Kawamura Midori
Department of Materials Science, Kitami Institute of Technology, Kitami 090-8507, Japan
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Kawamura Midori
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology,
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Yanagisawa Hideto
Department of Electrical and Electronic Engineering, Faculty of Engineering, Kitami Institute of Technology, 165 Koen-cho, Kitami 090-8507, Japan
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Yanagisawa Hideto
Department of Electrical and Electronic Engineering, Faculty of Engineering, Kitami Institute of Technology, 165 Koen-cho, Kitami, Hokkaido 090-8507, Japan
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Kaiya Fumihiro
Department of Electrical and Computer Engineering, Asahikawa National College of Technology, 2-2 Shunkodai, Asahikawa, Hokkaido 071-8142, Japan
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Yamane Misao
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology, 165 Koen-cho, Kitami, Hokkaido 090-8507, Japan
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Yamane Misao
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology, 165 Koen-cho, Kitami 090-8507, Japan
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Kimizaki Hidefumi
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology, 165 Koen-cho, Kitami, Hokkaido 090-8507, Japan
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Shinkai Satoko
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology, 165 Koen-cho, Kitami 090-8507, Japan
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Shinkai Satoko
Department of Control Engineering, Takuma National College of Technology, 551 Kohda, Takuma-cho, Kagawa 769-1192, Japan
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Sasaki Katsutaka
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology, 165 Koen-cho, Kitami 090-8507, Japan
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Sasaki Katsutaka
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology, 165 Koen-cho, Kitami, Hokkaido 090-8507, Japan
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Sasaki Katsutaka
Department of Materials Science and Engineering, Kitami Institute of Technology, Koen-cho, Kitami, Hokkaido 090-8507, Japan
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Kudo Masahiro
Center for Nano Materials and Technology, Japan Advanced Institute of Science and Technology, 1-1 Asahidai, Nomi, Ishikawa 923-1292, Japan
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Sasaki Hayato
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology, 165 Koen-cho, Kitami, Hokkaido 090-8507, Japan
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Shiojiri Masayuki
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology, 165 Koen-cho, Kitami 090-8507, Japan
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Inami Yuuki
Department of Materials Science and Engineering, Kitami Institute of Technology, Koen-cho, Kitami, Hokkaido 090-8507, Japan
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Obata Takeshi
Department of Materials Science and Engineering, Kitami Institute of Technology, Kitami, Hokkaido 090-8507, Japan
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SEKI Hikaru
Department of Biotechnology, Graduate School of Engineering, Osaka University
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Yanagisawa Hideto
Department of Electrical and Electronic Engineering,
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Abe Yoshio
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology, 165 Koen-cho, Kitami 090-8570, Japan
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Kawamura Midori
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology, 165 Koen-cho, Kitami 090-8570, Japan
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Sasaki Katsutaka
Department of Materials Science, Faculty of Engineering, Kitami Institute
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Sasaki Katsutaka
Department of Materials Science and Engineering, Kitami Institute of Technology, Kitami, Hokkaido 090-8507, Japan
著作論文
- Effects of Sputtering Parameters on the Formation of Single-Oriented (002) Ti Film on Si
- Difference in Thermal Degradation Behavior of ZrO_2 and HfO_2 Anodized Capacitors
- Epitaxial Ir Thin Film on (001) MgO Single Crystal Prepared by Sputtering
- Highly Texrured (100) RuO_2/(001) Ru Multilayers Preparedly by Sputtering
- Electrical Properties of HfO_2 Thin Insulating Film Prepared by Anodic Oxidation
- C-Axis-Oriented Ru Thin Fillns Prepared by Sputtering in Ar and O_2 Gas Mixture : Surfaces, Interfaces, and Films
- Solid-Phase Reactions of Diffusion Barriers of Ti and TiN to Copper Layers on SiO_2
- Realization of Cu(111) Single-Oriented State on SiO_2 by Annealing Cu-Zr Film and the Thermal Stability of Cu-Zr/ZrN/Zr/Si Contact System
- Single-Oriented Growth of(111)Cu Film on Thin ZrN/Zr Bilayered Film for ULSI Metallization
- Study on Preparation Conditions of Single-Oriented(002)Zr Thin Films on n-(001)Si
- Sequential Single-Oriented Growth of(111)Cu/(111)HfN/(002)Hf Trilayered Film on(001)Si and Its Thermal Stability
- Study on Preparation Conditions of High-Quality ZrN Thin Films Using a Low-Temperature Process
- Preparation of Oxygern-Containing Pt and Pt Oxide Thin Films by Reactive Sputtering and Their Characterization
- Formation Process and Electrical Property of RuO_2 Thin Films Prepared by Reactive Sputtering
- Initial Silicide Formation Process of Single Oriented (002) Hf Film on Si and Its Diffusion Barrier Property
- A Study on the Preparation Conditions of Single Oriented (002) Hf Film on n-(001) Si
- Surface Oxidation Behavior of TiN Film Caused by Depositing SrTiO_3 Film
- Oriented Growth of Cu(110) on YSi_(1100)/Si(100) and Diffusion Behavior in Copper Silicide Formation
- Auger Electron Spectroscopy Study on the Stability of the Interface between Deposited Cu_9Al_4 Intermetallic Compound Film and Si
- Influence of Sputtering Parameters on the Formation Process of High-Quality and Low-Resistivity HfN Thin Film
- Preparation of CU_9Al_4 Intermetallie Compound Films as a Metallization Material for LSI Technology
- Interfacial Solid-Phase Reaction in Al/HfN/Hf/Si Contact System during Postmetallization Annealing
- Auger Electron Spectroscopy Study on the Characterization and Stability of the Cu_9Al_4/TiN/Si System
- Formation Process and Electrical Property of IrO_2 Thin Films Prepared by Reactive Sputtering
- Preparation of Cu_Zr_7 Intermetallic Compound Film and Its Application as a Diffusion Barrier in Cu/Cu_Zr_7/ZrN/Si Contact System
- Epitaxial Growth of HfN Film and Sequential Single-Oriented Growth of Al/HfN Bilayered Film on (001) and (111) Si
- Application of Al_3Hf/Hf Bilayered Film as a Diffusion Barrier to Al Metallization System of Si Large-Scale Integration
- Effect of Heat Treatment on Ion Conductivity of Hydrated ZrO2 Thin Films Prepared by Reactive Sputtering Using H2O Gas
- Preparation of RhO2 Thin Films by Reactive Sputtering and Their Characterizations
- Electrical Properties of Amorphous Rh Oxide Thin Films Prepared by Reactive Sputtering
- Thermal Stability of RuO_2 Thin Films and Effects of Annealing Ambient on Their Reduction Process
- Preparation of PtO and α-PtO_2 Thin Films by Reactive Sputtering and Their Electrical Properties
- Effects of Sputtering Gas Pressure on Electrochromic Properties of Ni Oxyhydroxide Thin Films Prepared by Reactive Sputtering in H2O Atmosphere
- Dielectric Properties of Zr–Al Anodized Thin Film Capacitors Prepared Using Al-Doped Zr Alloy Films
- Effects of Substrate Cooling during Sputter Deposition of Hydrogen-Containing Ta2O5 Thin Films in H2O Atmosphere on their Ion Conductivity
- Transmissin Electron Microscopy Observation of Polymorphic Epitaxial Growth of YSi_ Layer in Al(001)/YSi_/Si(001) Systems
- Thermal Stability of W_2N Film as a Diffusion Barrier between Al and Si
- Stoichiometry of Ta-N Film and Its Application for Diffusion Barrier in the Al_3Ta/Ta-N/Si Contact System
- Interaction of Al_3Ta Intermetallic Compound Film with Si : Surfaces, Interfaces and Films
- Preparation and Characterizations of Al_3Ta Intermetallic Compound Films : Surfaces, Interfaces and Films
- Oxidation Characteristics of Al–Ta Thin Alloy Films as a Passivation Layer on Cu
- Effects of Al3Ta/TaN Bilayered Diffusion Barriers in the Al/Si Contact Systems
- Auger Electron Spectroscopy Study on the Stability and the Interfacial Reaction of Ta, Ta-N arnd TaN Films as a Diffusion Barrier between Cu_9Al_4 Film and Si
- Characterizations and Barrier Properties of WN_x Film in the Al_W/WN_x/Si Contact System
- Control of Epitaxial Growth Plane of Rh Thin Films on A-Plane Sapphire by Sputter Deposition
- Capacitor Property and Leakage Current Mechanism of ZrO2 Thin Dielectric Films Prepared by Anodic Oxidation
- Electrical Properties of a Thin Anodized Capacitor Made of Y-Doped Al Alloy Film
- Epitaxial Growth of (001)Rh Thin Film on (001)MgO Single-Crystal Substrate by Sputtering
- Realization of Sequential Epitaxial Growth of Cu/HfN Bilayered Films on (111) and (001) Si
- Ni Oxyhydroxide Thin Films Prepared by Reactive Sputtering Using $\text{O$_{2}$} + \text{H$_{2}$O}$ Mixed Gas
- Target-Surface Compound Layers Formed by Reactive Sputtering of Si Target in $\text{Ar}+\text{O$_{2}$}$ and $\text{Ar}+\text{N$_{2}$}$ Mixed Gases
- Preparation of Low-Resistivity $\mathbf{\alpha}$-Ta Thin Films on (001) Si by Conventional DC Magnetron Sputtering
- Crystal Orientation Change of Ni Films by Sputtering in Ar-N2 Mixed Gases
- Improvement of the Crystal Orientation and Surface Roughness of Ru Thin Films by Introducing Oxygen during Sputtering
- Preparation of a Contact System with a Single-Oriented (111)Al Overlayer by Interposing a Thin ZrN/Zr Bilayered Barrier Applicable to Sub-0.25-$\mu$m Design Rule
- Preparation of Hydrogen-Containing Ta2O5 Thin Films by Reactive Sputtering Using $\text{O$_{2}$}+\text{H$_{2}$O}$ Mixed Gas
- Epitaxial Growth of (001)ZrN Thin Films on (001)Si by Low Temperature Process
- Crystal Orientation of Epitaxial $\alpha$-Ta(110) Thin Films Grown on Si(100) and Si(111) Substrates by Sputtering
- Epitaxial Growth of (0001)Ru Thin Films on (111)ZrN/(111)Si by Low-Temperature Process and Their Surface Morphologies
- Preparation of Single-Oriented (111)VN Film with Low-Resistivity and Its Application as Diffusion Barrier between Cu and Si
- Loss Properties of Anodized Thin-Film Capacitors Fabricated Using Hf-Doped Nb Alloy Films
- Thermally Stable Ag Thin Films Modified with Very Thin Al Oxide layers
- Oxidation and Morphology Change of Ru Films Caused by Sputter Deposition of Ta2O5 Films
- Dielectric Properties of SrTiO 3 Capacitor Using TiN Bottom Electrode and Effects of SrTiO 3 Film Thickness
- Formation Process and Electrical Property of IrO2 Thin Films Prepared by Reactive Sputtering
- Effect of Substrate Temperature on Epitaxial Orientation of Rh Thin Films Sputtered on A-Plane Sapphire
- Preparation of Thin-Film Capacitor with High Reliability by Anodization of Zr–Al Alloy Film
- Preparation of Oxygen-Containing Pt and Pt Oxide Thin Films by Reactive Sputtering and Their Characterization