UMEZAWA Toshiji | Department of Electronic Engineering, Faculcy of Engineering, Kitami Institute of Technology
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概要
- 同名の論文著者
- Department of Electronic Engineering, Faculcy of Engineering, Kitami Institute of Technologyの論文著者
関連著者
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Noya Atsushi
Department Of Electrical And Electronic Engineering Faculty Of Engineering Kitami Institute Of Techn
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Sasaki Katsutaka
Department Of Electrical And Electronic Engineering Faculty Of Engineering Kitami Institute Of Techn
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UMEZAWA Tomokazu
Faculty of Science and Technology,Keio University
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UMEZAWA Toshiji
Department of Electronic Engineering, Faculcy of Engineering, Kitami Institute of Technology
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Umezawa T
Teijin Ltd. Hiroshima Jpn
著作論文
- Stoichiometry of Ta-N Film and Its Application for Diffusion Barrier in the Al_3Ta/Ta-N/Si Contact System
- Interaction of Al_3Ta Intermetallic Compound Film with Si : Surfaces, Interfaces and Films
- Preparation and Characterizations of Al_3Ta Intermetallic Compound Films : Surfaces, Interfaces and Films