Fabrication of Barium Titanate/Strontium Titanate Artificial Superlattice by Atomic Layer Epitaxy (<Special Issue> FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)
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概要
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Epitaxial growth of BaTiO_3, SrTiO_3 and their superlattices was carried out by the alternating evaporation method using an atomic-layer-epitaxy control system for molecular beam epitaxy (MBE). Stable and reproducible control of the chemical composition was achieved by layer-by-layer growth with this system. Both BaTiO_3 and SrTiO_3 were grown epitaxially on SrTiO_3 substrates, and clear oscillations of reflection high-energy electron diffraction (RHEED) intensity were observed, corresponding to the alternating depositions of BaO and TiO_2 in BaTiO_3 growth. The artificial superlattice with the structure of [(BaTiO_3)_5/(SrTiO_3)_5]_7 was fabricated, and the X-ray diffraction (XRD) pattern of the superlattice was simulated by a step model. Diffraction angles of satellite peaks and the shape of Laue peaks in XRD patterns were consistent with those calculated, indicating that the designed structure was fabricated in the superlattice.
- 社団法人応用物理学会の論文
- 1994-09-30
著者
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Suzuki T
Free Electron Laser Research Institute Inc.
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TSURUMI Takaaki
Graduate School of Science and Engineering, Tokyo Institute of Technology
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Suzuki T
Nhk (japan Broadcasting Corp.) Tokyo
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Suzuki Tatsuro
Department Of Electrical Engineering Shizuoka University
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Yamane Misao
Department Of Materials Science Faculty Of Engineering Kitami Institute Of Technology
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Suzuki Tatsuhiko
Department Of Electrical Engineering Faculty Of Engineering Science University Of Tokyo
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Suzuki T
Process & Manufacturing Engineering Center Semiconductor Company Toshiba Corporation
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DAIMON Masaki
Department of Inorganic materials, Faculty of Engineering, Tokyo Institute of Technology
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Daimon M
Tokyo Inst. Technol. Tokyo
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Yamane M
Tokyo Inst. Technol. Tokyo Jpn
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Yamane Masayuki
Department Of Metallugy And Ceramics Science Graduate School Of Science And Engineering Tokyo Instit
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Tsurumi T
The Graduate School Of Sci. And Engineering Tokyo Inst. Of Technol.
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Tsurumi Takaaki
Department Of Inorganic Materials Faculty Of Engineering Tokyo Institute Of Technology
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Tsurumi Takaaki
The Graduate School Of Sci. And Engineering Tokyo Inst. Of Technol.
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SUZUKI Toshimasa
Department of Crystalline Materials Science, Graduate School of Engineering, Nagoya University
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Suzuki T
Tdk Corp. Chiba Jpn
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Tsurumi Takaaki
Department Of Metallurgy And Ceramics Science Graduate School Of Science And Engineering Tokyo Insti
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YAMANE Masayuki
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology
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Yamane Masayuki
Department of Inorganic Materials, Tokyo Institute of Technology, Ohokayama, Meguro-ku, Tokyo 152
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