Large-Area Doping Process for Fabrication of poly-Si Thin Film Transistors Using Bucket Ion Source and XeCl Excimer Laser Annealing
スポンサーリンク
概要
- 論文の詳細を見る
A large-area doping process for polycrystalline Si (poly-Si) thin-film transistor addressed liquid crystal displays (TFT/ LCD's) has been developed. A large Ton beam that was extracted from the bucket ion source and a XeCl excimer laser were utilized for impurity doping and impurity activation. A sufficiently low value of sheet resistance (500±25Ω/□) was obtained for an implantation time of 10 s. The poly-Si TFT's fabricated by using this technique have good characteristics and uniformity. This technique seems suitable for the fabrication of large area poly-Si TFT/LCD's.
- 社団法人応用物理学会の論文
- 1990-12-20
著者
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Suzuki T
Free Electron Laser Research Institute Inc.
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Mimura A
Department Of Applied Chemistry And Biotechnology Faculty Of Engineering University Of Yamanashi
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Mimura A
Hitachi Ltd. Ibaraki Jpn
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Mimura Akio
Hitachi Research Laboratory Hitachi Ltd.
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Suzuki T
Nhk (japan Broadcasting Corp.) Tokyo
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Suzuki Tatsuro
Department Of Electrical Engineering Shizuoka University
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AOYAMA Takahiro
Daihen Co.
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Aoyama T
Hitachi Ltd. Ibaraki Jpn
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Mimura A
Univ. Of Yamanashi Yamanashi Jpn
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Mimura Akiko
Department Of Applied Chemistry And Biotechnology Faculty Of Engineering University Of Yamanashi
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Mochizuki Yasunori
Institute Of Industrial Science University Of Tokyo
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Mochizuki Yasuhiro
Hitachi Research Laboratory Hitachi Ltd.
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Mochizuki Yasuhiro
Hitachi Research Labolatory Hitachi Ltd.
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Miyata K
Institute For Drug Discovery Research Yamanouchi Pharmaceutical Co.
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KAWACHI Genshiro
Hitachi Research Laboratory, Hitachi Ltd.
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Ohno Yasunori
Hitachi Research Laboratory, Hitachi Ltd.
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Konishi N
Tohoku Univ. Sendai Jpn
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Konishi Nobutake
Hitachi Research Laboratory Hitachi Ltd.
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Miyata K
Hitachi Research Laboratory Hitachi Ltd.
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MIYATA Kenji
Mobara Works, Hitachi Ltd.
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Suzuki T
Tdk Corp. Chiba Jpn
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KAWACHI Genshiro
G. T. C.
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AOYAMA Takashi
G. T. C.
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SUZUKI Takaya
G. T. C.
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Kawachi G
Hitachi Ltd. Ibaraki Jpn
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Miyata Kenji
Mobara Works Hitachi Ltd.
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KONISHI Nobutake
Hitachi Research Laboratory
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