Application of Ion Doping and Excimer Laser Annealing to Fabrication of Low-Temperature Polycrystalline Si Thin-Film Transistors
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1994-04-15
著者
-
Mimura A
Department Of Applied Chemistry And Biotechnology Faculty Of Engineering University Of Yamanashi
-
Mimura A
Hitachi Ltd. Ibaraki Jpn
-
Mimura Akio
Hitachi Research Laboratory Hitachi Ltd.
-
AOYAMA Takahiro
Daihen Co.
-
Aoyama T
Hitachi Ltd. Ibaraki Jpn
-
AOYAMA Takashi
Hitachi Research Laboratory, Hitachi Ltd.
-
Mimura A
Univ. Of Yamanashi Yamanashi Jpn
-
Mimura Akiko
Department Of Applied Chemistry And Biotechnology Faculty Of Engineering University Of Yamanashi
-
KONISHI Nobutake
Hitachi Research Laboratory, Hitachi Ltd.
-
KAWACHI Genshiro
Hitachi Research Laboratory, Hitachi Ltd.
-
Konishi N
Tohoku Univ. Sendai Jpn
-
Konishi Nobutake
Hitachi Research Laboratory Hitachi Ltd.
-
Kawachi G
Hitachi Ltd. Ibaraki Jpn
-
Kawachi Genshiro
Hitachi Research Laboratory Hitachi Ltd.
-
Aoyama Takashi
Hitachi Research Laboratory Hitachi Ltd
-
KONISHI Nobutake
Hitachi Research Laboratory
関連論文
- Purification and Characterization of L-2,3-Butanediol Dehydrogenase of Brevibacterium saccharolyticum C-1012 Expressed in Escherichia coli(Microbiology & Fermentation Technology)
- Characterization of the NADH-Linked Acetylacetoin Reductase/2, 3-Butanediol Dehydrogenase Gene from Bacillus cereus YUF-4
- Cloning, Expression and Nucleotide Sequence of the L-2, 3-Butanediol Dehydrogenase Gene from Brevibacterium saccharolyticum C-1012
- Molecular Generation of an Escheichia coli Srain Pproducing Only the meso-Isomer of 2,3-Butanediol
- Sequence Analysis of the Gene for and Characterization of D-Acetoin Forming meso-2,3-Butanediol Dehydrogenase of Klebsiella pneumoniae Expressed in Escherichia coli
- Preparation of a Chiral Acetoinic Compound Using Transgenic Escherichia coli Expressing the 2,3-Butanediol Dehydrogenase Gene
- Increased Production of Antioxidative Sesaminol Glucosides from Sesame Oil Cake through Fermentation by Bacillus circulans Strain YUS-2(Microbiology & Fermentation Technology)
- 3K10-1 Utilization of palm oil mill fiber in situ bioactivator process by Chaetomium sp. nov. MS-017
- Acetylacetoin Synthase as a Marker Enzyme for Detecting the 2,3-Butanediol Cycle
- 314 Enzymes decomposing palm oil mill fiber in fungus Ms-017 under higher temperature
- 1027 Isolation and cultivation of fungi on palm oil mill fiber under higher temperature
- In Situ Formation of Ohmic Contact Electrodes of Cu and Ag onto the Fractured Surface of (Bi, Pb)-Sr-Ca-Cu-O Ceramics
- Suppression of Transient Enhanced Diffusion by Local-Oxidation-Silicon-Induced Stress
- Suppression of Transient Enhanced Diffusion by LOCOS Induced Stress
- Purification and Properties of Acetylacetoin Synthase form Bacillus sp. YUF-4
- Ru Electrode Deposited by Sputtering in Ar/O_2 Mixture Ambient
- Interfacial Layers between Si and Ru Films Deposited by Sputtering in Ar/O_2 Mixture Ambient
- High Tilt Angle Ion Implantation into Polycrystalline Si Gates
- Analysis of Non-Uniform Boron Penetration of Nitrided Oxide in PMOSFETs Considering Two-Dimensional Nitrogen Distribution
- Boron Penetration Enhanced by Gate Ion Implantation Damage in PMOSFETs
- Hydrogen-Enhanced Boron Penetration in PMOS Devices during SiO_2 Chemical Vapor Deposition
- Hydrogen-Enhancing Boron Penetration in P-MOS Devices during SiO_2 Chemical Vapor Deposition
- Boron Diffusion in Nitrided-Oxide Gate Dielectrics Leading to High Suppression of Boron Penetration in P-MOSFETs
- Boron Diffusion in Nitrided Oxide Gate Dielectrics Leading to High Suppression of Boron Penetration in P-MOSFETs
- Thermal Budget for Fabricating a Dual Gate Deep-Submicron CMOS with Thin Pure Gate Oxide
- Thermal Budget for Fabricating A Dual Gate Deep-Submicron CMOS with Thin Pure Gate Oxide
- Nitrogen Distribution and Chemical Bonding State Analyses in Oxynitride Film by Spatially Resolved Electron Energy Loss Spectroscopy (EELS)
- Two-Dimensional Boron Analysis in Borophosphosilicate Glass Film Using Transmission Electron Microscope with Imaging Filter
- Separation and Properties of Two Acetylacetoin Reductases from Bacillus cereus YUF-4
- Spatially-resolved EELS analysis of multilayer using EFTEM and STEM
- A Light Activated High Power Bidirectional Thyristor : B-5: SENSING DEVICES
- Strain Distribution Measurement in Stainless Steels by Convergent-Beam Electron Diffraction
- A 24 cm Diagonal TFT-LCD Fabricated Using a Simplified, Four-Photolithographic Mask Process (Special Issue on Liquid-Crystal Displays)
- On-Line Monitoring of Cell Concentrations by Dielectric Measurements
- "Integrated Photo-coupled Semiconductor Crosspoint Switches" : B-5: LASERS (2)
- Study of L_ dependence of 2-D carrier profile in N-FET by Scanning Tunneling Microscopy
- Boron Diffusion in SiO_2 Involving High-Concentration Effects
- Boron Diffusion in SiO_2 Involving High-Concentration Effects
- Scanning Tunneling Microscopy Study of Submicron-Sized pn Junction on Si(001) Surfaces
- Application of Ion Doping and Excimer Laser Annealing to Fabrication of Low-Temperature Polycrystalline Si Thin-Film Transistors
- Effect of Ion Doping Process on Thin-Film Transistor Characteristics Using a Bucket-Type Ion Source and XeCl Excimer Laser Annealing
- Large-Area Doping for Poly-Si Thin Film Transistors Using Bucket Ion Source with an RF Plasma Cathode
- Effects of Line Resistance and Parasitic Capacitance on Transmittance Distribution in TFT-LCDs
- Effect of Channel Implantation on the Device Performance of Low Temperature Processed Polycrystalline Silicon Thin Film Transistors
- Time-resolved acquisition technique for spatially-resolved electron energy-loss spectroscopy by energy-filtering TEM
- Time-resolved acquisition technique for elemental mapping by energy-filtering TEM
- Current Status and Future Trend of Analytical Instruments for Failure Analyses in Si Process
- Isolation and Characterization of a Fast-Growing, Thermophilic, Hydrogenotrophic Methanogen
- Cultivation of Thermophilic Methanogen KN-15 on H_2-CO_2 under Pressurized Conditions
- Application of Two-Step Composting Process to Rice Straw Compost
- On-Line Monitoring of Cell Concentrations during Yeast Cultivation by Dielectric Measurements
- Growth of Thermophilic Methanogen KN-15 on H_2-CO_2 under Batch and Continuous Conditions
- A Two-Stpe Composting Process for Woody Resources
- Leakage Current Reduction of Poly-Si Thin Film Transistors by Two-Step Annealing
- Development of a real-time jump-ratio imaging system equipped with a STEM
- Interaction of Hydrogenated Silicon Nitride Films with Indium Tin Oxide
- Dislocations and Tungsten Concerntration Profiles in Tungsten-Silicon Contact Areas
- Flat and Large Poly-Si Grains by a Continuous Process of Plasma-Enhanced Chemical Vapor Deposition of a-Si and Its Direct Laser Crystallization
- Large-Area Doping Process for Fabrication of poly-Si Thin Film Transistors Using Bucket Ion Source and XeCl Excimer Laser Annealing
- TEM Observations of Initial Crystallization States for LPCVD Si Films : Condensed Matter
- Transmission Electron Microscope Sample Shape Optimization for Energy Dispersive X-Ray Spectroscopy Using the Focused Ion Beam Technique
- Defects in Si Thin-Film Transistors Studied by Spin-Dependent Transport
- Saturation Measurements of Electrically Detected Magnetic Resonance in Hydrogenated Amorphous Silicon Based Thin-Film Transistors
- The Contact Resistance of the YBa2Cu3O7-δ-Metal Film System