Transmission Electron Microscope Sample Shape Optimization for Energy Dispersive X-Ray Spectroscopy Using the Focused Ion Beam Technique
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概要
- 論文の詳細を見る
By utilizing the focused ion beam (FIB) technique, we evaluated signal intensity ratios of analyzed areas and the matrix for energy dispersive X-ray spectroscopy with a transmission electron microscope (TEM-EDX). In the case of conventional FIB samples (H-shape), electrons scattered from the thin film area irradiate the sidewalls of the matrix (Si substrate) under the thin film position and they generate a large number of X-rays. These matrix signals are reduced by making samples as U-shaped and removing the underlying sidewalls. The final matrix (Si) X-ray signal is reduced by 90% compared with the conventional H-shaped samples.
- 社団法人応用物理学会の論文
- 1998-01-15
著者
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ISAKOZAWA Shigeto
Instrument Division, Hitachi Ltd
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AOYAMA Takashi
Hitachi Research Laboratory, Hitachi Ltd.
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ISAKOZAWA Shigeto
Hitachi High-Technologies Corporation
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Saito Masakazu
Hitachi Research Laboratory Hitachi Ltd.
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Hashimoto Takahito
Instrument Division Hitachi Ltd.
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Aoyama Takashi
Hitachi Research Laboratory Hitachi Ltd
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Isakozawa S
Hitachi High-technologies Corporation
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Isakozawa Shigeto
Instrument Division Hitachi Ltd
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