The development and characteristics of a high-speed EELS mapping system for a dedicated STEM

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概要

• 論文の詳細を見る
• 2008-04-01

著者

• ISAKOZAWA Shigeto

  Hitachi High-Technologies Corporation

• Terada Shohei

  Hitachi Research Lab. Hitachi Ltd.

• KAJI Kazutoshi

  Hitachi High-Technologies Corp.

• JARAUSCH Konrad

  Hitachi High Technologies America, Inc.

• BABA Norio

  Kogakuin-University

• Jarausch Konrad

  Hitachi High Technologies America Inc.

• Isakozawa Shigeto

  Hitachi High-technologies Corp.

関連論文

• Development of dedicated STEM with high stability
• Spatially-resolved EELS analysis of multilayer using EFTEM and STEM
• Time-resolved acquisition technique for spatially-resolved electron energy-loss spectroscopy by energy-filtering TEM
• Time-resolved acquisition technique for elemental mapping by energy-filtering TEM
• The development and characteristics of a high-speed EELS mapping system for a dedicated STEM
• Development of a real-time jump-ratio imaging system equipped with a STEM
• Transmission Electron Microscope Sample Shape Optimization for Energy Dispersive X-Ray Spectroscopy Using the Focused Ion Beam Technique
• Low-Temperature Bonding of Silver to Aluminum
• Polymorphs Discrimination of Nickel Silicides in Device Structure by Improved Analyses of Low Loss Electron Energy Loss Spectrum

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