Time-resolved acquisition technique for spatially-resolved electron energy-loss spectroscopy by energy-filtering TEM

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概要

• 論文の詳細を見る
• Published for the Japanese Society of Electron Microscopy by Oxford University Pressの論文
• 2002-10-01

著者

• AOYAMA Takashi

  Hitachi Research Laboratory, Hitachi Ltd.

• MITSUI Yasuhiro

  Semiconductor & Integrated Circuits Division, Hitachi Ltd.

• Yano F

  Semiconductor & Integrated Circuits Division Hitachi Limited

• Yano Fumiko

  Central Research Laboratory Hitachi Ltd.

• Terada Shohei

  Hitachi Research Laboratory Hitachi Limited

• Terada Shohei

  Hitachi Research Lab. Hitachi Ltd.

• Aoyama T

  Hitachi Research Laboratory Hitachi Limited

• YANO Fumiko

  Semiconductor & Integrated Circuits Division, Hitachi Limited

• Mitsui Y

  Semiconductor & Integrated Circuits Division Hitachi Limited

• Aoyama Takashi

  Hitachi Research Laboratory Hitachi Ltd

関連論文

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• Quantitative Analysis of Trace Water in Highly Puified Nitrogen Gas by Atmospheric Pressure Ionization Mass Spectrometer
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