Aoyama Takashi | Hitachi Research Laboratory Hitachi Ltd

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概要

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著作論文

Nitrogen Distribution and Chemical Bonding State Analyses in Oxynitride Film by Spatially Resolved Electron Energy Loss Spectroscopy (EELS)
Two-Dimensional Boron Analysis in Borophosphosilicate Glass Film Using Transmission Electron Microscope with Imaging Filter
Spatially-resolved EELS analysis of multilayer using EFTEM and STEM
Strain Distribution Measurement in Stainless Steels by Convergent-Beam Electron Diffraction
Application of Ion Doping and Excimer Laser Annealing to Fabrication of Low-Temperature Polycrystalline Si Thin-Film Transistors
Effect of Ion Doping Process on Thin-Film Transistor Characteristics Using a Bucket-Type Ion Source and XeCl Excimer Laser Annealing
Large-Area Doping for Poly-Si Thin Film Transistors Using Bucket Ion Source with an RF Plasma Cathode
Time-resolved acquisition technique for spatially-resolved electron energy-loss spectroscopy by energy-filtering TEM
Time-resolved acquisition technique for elemental mapping by energy-filtering TEM
Current Status and Future Trend of Analytical Instruments for Failure Analyses in Si Process
Leakage Current Reduction of Poly-Si Thin Film Transistors by Two-Step Annealing
Development of a real-time jump-ratio imaging system equipped with a STEM
Dislocations and Tungsten Concerntration Profiles in Tungsten-Silicon Contact Areas
TEM Observations of Initial Crystallization States for LPCVD Si Films : Condensed Matter
Transmission Electron Microscope Sample Shape Optimization for Energy Dispersive X-Ray Spectroscopy Using the Focused Ion Beam Technique

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