Nitrogen Distribution and Chemical Bonding State Analyses in Oxynitride Film by Spatially Resolved Electron Energy Loss Spectroscopy (EELS)
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1998-06-15
著者
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Kimoto K
Advanced Electron Microscope Group Advanced Nano- Characterization Center National Institute For Mat
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Kimoto Koji
Hitachi Research Laboratory Hitachi Ltd.
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Kimoto Koji
Advanced Electron Microscope Group Advanced Nano- Characterization Center National Institute For Mat
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Kimoto K
Hitachi Ltd. Ibaraki Jpn
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Aoyama T
Toshiba Corp. Yokohama Jpn
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Aoyama T
Hitachi Ltc. Ibaraki Jpn
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Aoyama Tomonori
Microelectronics Engineering Laboratory Semiconductor Company Toshiba Corporation
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Kimoto K
Hitachi Research Laboratory Hitachi Ltd.
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Kimoto Koji
National Institute For Materials Science
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Kimoto Koji
Advance Materials Laboratory National Institute For Materials Science
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SEKIGUCHI Tomoko
Hitachi Research Laboratory, Hitachi Ltd.
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AOYAMA Takashi
Hitachi Research Laboratory, Hitachi Ltd.
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MITSUI Yasuhiro
Semiconductor & Integrated Circuits Division, Hitachi Ltd.
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Sekiguchi Tomoko
Hitachi Research Laboratory Hitachi Ltd.:(pressent Address)central Research Laboratory Hitachi Ltd.
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Kimoto Koji
Advanced Materials Laboratory National Institute For Materials Science
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Kimoto Koji
Hitachi Research Laboratory Hitachi Ltd
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Mitsui Y
Semiconductor & Integrated Circuits Division Hitachi Ltd.
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Aoyama Takashi
Hitachi Research Laboratory Hitachi Ltd
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Kimoto Koji
Advanced Electron Microscope Group, Advanced Nano- Characterization Center, National Institute for Materials Science
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