A Drift Tube for Monitoring ppb Trace Water
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概要
- 論文の詳細を見る
This paper demonstrates the possibility of using a drift tube to monitor trace water in nitrogen gases for semiconductor fabrication processes. In the drift tube. ions are produced by corona discharge and drift an atmospheric pressire. The arrival-time spectra are observed for nitrogen gases with water concentrations at several ppb levels. The spectra show an obvious peak, which disappears when the water concentration increases to several tens of ppb. This suggests that the peak results from nitrogen cluster ions noto reacting with water molecules. This is supported by the ion mobility calculated for the peak in the spectra, and also by related ion-molecular reaction kinetics. It is possible that the developed drift tube determines the water concentration at several tens of ppb levels or below from the intensity change in the arrival-time spectra.
- 社団法人応用物理学会の論文
- 1992-08-15
著者
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Hasumi K
Tokyo Noko Univ. Tokyo Jpn
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Irie T
Kyoto Univ. Kyoto Jpn
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MITSUI Yasuhiro
Central Research Laboratory, Hitachi Ltd.
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IRIE Takashi
Central Research Laboratory, Hitachi Ltd.
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Mitsui Y
Semiconductor & Integrated Circuits Division Hitachi Ltd.
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HASUMI Keiji
Precision Center, Hitachi Tokyo Electronics Co., Ltd.
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