Measurement of Strain in Locally Oxidized Silicon using Convergent-Beam Electron Diffraction
スポンサーリンク
概要
- 論文の詳細を見る
Possibility has been studied for analysis using convergent-beam electron diffraction (CBED) of strain in large-scale integrated circuits (LSIs). In the present study, a strain of 1×10^<-4> can be detected, which is sufficient to analyze strain in LSIs. This technique is applied to the measurement of strain in locally oxidized silicon (LOCUS). The silicon substrate is found to have a maximum compressive strain of 4×10^<-4> at a point 1.5μm from the SiO_2 edge. Although the influence of specimen thinning preparation on stress is not negligible, the stress distribution was found to suffer from a uniform shift of tensile stress by about 30 MPa.
- 社団法人応用物理学会の論文
- 1993-02-01
著者
-
Kimoto Koji
Hitachi Research Laboratory Hitachi Ltd.
-
Usami Katsuhisa
Hitachi Research Laboratory
-
Tanaka Michiyoshi
Institute For Scientific Measurements
-
Tanaka Michiyoshi
Institute For Scientific Measurements Tohoku University
-
SAKATA Hiroshi
Mechanical Engineering Research Laboratory,Hitachi Ltd.,
-
Kimoto Koji
Hitachi Research Laboratory Hitachi Ltd
-
Sakata Hiroshi
Mechanical Engineering Research Laboratory Hitachi Ltd.
関連論文
- Effect of Quenched Disorder on Charge Ordering Structure in RE_AE_NiO_4(RE=La, Pr, Nd, Sm;AE=Ca, Sr)(Condensed matter: electronic structure and electrical, magnetic, and optical properties)
- Local lattice parameter determination of a silicon (001) layer grown on a sapphire (1102) substrate using convergent-beam electron diffraction
- Lattice parameter determination of a composition controlled Si_Ge_x layer on a Si (001) substrate using convergent-beam electron diffraction
- Formation of a Superlattice Order from a Fundamental-Lattice Decagonal Quasicrystal of Al_Ni_Co_8(Condensed Matter : Structure, Mechanical and Thermal Properties)
- TEM study of the influence of antisite defects on magnetic domain structures in double perovskite Ba_2FeMoO_6
- Lattice parameter determination of a strained area of an InAs layer on a GaAs substrate using CBED
- Hybridized Microcrystals Composed of Metal Fine Particles and π-Conjugated Organic Microcrystals : Surfaces, Interfaces, and Films
- Relationship between Crystal Structures and Solid Solution of Tl-Sr-Ca-Cu-O and Tl-Ba-Ca-Cu-O Superconductors
- Observation of Allende and Antarctic meteorites by monochromatic X-ray CT based on synchrotron radiation
- Microstructural Observation of Si_Ge_x Thin Films Prepared by Pulsed Ion-Beam Evaporation
- HRTEM study of new series of oxycarbonitrate superconductors (Cu,C,N)(n=1-6)
- Light element analysis in oxycarbonate superconductors using EELS
- Nitrogen Distribution and Chemical Bonding State Analyses in Oxynitride Film by Spatially Resolved Electron Energy Loss Spectroscopy (EELS)
- Chemical shift mapping of Si L and K edges using spatially resolved EELS and energy-filtering TEM
- Two-Dimensional Boron Analysis in Borophosphosilicate Glass Film Using Transmission Electron Microscope with Imaging Filter
- Observation of Compositional Separation in CoCrTa Thin Film Using Transmission Electron Microscope with Imaging Filter
- High Spatial Resolution Elemental Mapping of Multilayers Using a Field Emission Transmission Electron Microscope Equipped with an Imaging Filter
- Diffuse Phase Transition and Anisotropic Evolution of Nanodomains in Nd_Sr_MnO_3(Condensed matter : electronic structure and electrical, magnetic, and optical properties)
- Carbon Nanofilm with a New Structure and Property
- Structural Study of an Al-Co Approximant by High-Angle Annular Dark-Field Scanning Transmission Electron Microscopy(Condensed Matter : Structure, Mechanical and Thermal Properties)
- X-Ray Computerized Tomography Using Monochromated Synchrotron Radiation : Techniques, Instrumentations and Measurement
- Development of dedicated STEM with high stability
- The study of AI-L_23 ELNES with resolution-enhancement software and first-principles calculation
- Spatially-resolved EELS analysis of multilayer using EFTEM and STEM
- X-Ray Absorption Studies of High-T_c YBa_2Cu_3O_x : Condensed Matter
- Precise EXAFS Analysis for High-T_c YBa_2Cu_3O_x : Condensed Matter
- Characterization of Icosahedral Quasicrystals by Convergent-Beam Electron Diffraction((B)Quasicrystals)
- X-Ray Sensing Pickup Tube
- Improvement of Spatial Resolution of Monochromatic X-ray CT Using Synchrotron Radiation
- Effects of Hydrogen Ion Implantation on Superconductivity in YBa_2Cu_3O_ : Electrical Properties of Condensed Matter
- Fourier images feature of lattice fringes formed by low-loss electrons as observed using spatially-resolved EELS technique
- Elemental Mapping Using a Field Emission Transmission Electron Microscope with an Imaging Filter
- Modulated Crystal Structure and Spin/Hole Arrangement in the Chain Compound Ca_xCuO_2 (x=0.8240)
- Simulations of Kikuchi patterns due to thermal diffuse scattering on MgO crystals
- Rietveld Refinement of the Structure of TlSr_2CaCu_2O_7 by X-Ray Powder Diffraction Data
- X-Ray Fluorescence Analysis of Hg in SiO_2 Films Deposited by Hg-Sensitized Photo-CVD
- Fretting Fatigue Analysis Using Fracture Mechanics
- Temperature Dependence of Lattice Parameters of YBa_2Cu_3O_x Superconductor at Low Temperature
- Study of X-Ray Reflectivity from Si Film /Interface Layer/Si Substrate and Application to Low-Temperature Epitaxially Grown Si/Si Substrate
- Residual Stress Measurement in Silicon Substrates after Thermal Oxidation
- Quantitative Elemental Mapping of Stainless Steel Using an Imaging Filter
- XPS Determination of Amount of Incorporated Rare Gas in Amorphous Silicon Films Produced with Reactive Sputtering Method
- Measurement of Strain in Locally Oxidized Silicon using Convergent-Beam Electron Diffraction
- Observations of Gold Atomic Clusters in Magnesium Oxide Films under Off-Bragg Conditions
- Raman Studies of Internal Stress and Crystallinity of Pulse-Laser-Irradiated Silicon on Sapphire (SOS) in Relation to Hall Mobility
- Elemental mapping and chemical shift analysis using energy-filtering transmission electron microscopy(Abstracts of Doctoral Dissertations,Annual Report (from April 1997 to March 1998))
- High Resolution Monochromatic X-Ray Tomography Using Synchrotron Radiation
- Study of Quantitative Elemental Analysis of Monochromatic X-Ray CT Using Synchrotron Radiation