High Spatial Resolution Elemental Mapping of Multilayers Using a Field Emission Transmission Electron Microscope Equipped with an Imaging Filter
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1994-11-15
著者
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Kimoto Koji
Hitachi Research Laboratory Hitachi Ltd.
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Hirano Tomohisa
Department Of Electrical Engineering Faculty Of Engineering Ehime University
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Kimoto K
Hitachi Ltd. Ibaraki Jpn
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USAMI Katsuhisa
Hitachi Research Laboratory of Hitachi Ltd.
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Hirano Tatsumi
Hitachi Research Laboratory, Hitachi, Ltd.
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Usami K
Tokyo Inst. Technol. Tokyo Jpn
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Usami Katsuhisa
Hitachi Research Laboratory
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HOSHIYA Hiroyuki
Central Research Laboratory, Hitachi, Ltd.
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Hoshiya Hiroyuki
Central Research Laboratory Hitachi Ltd.
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Hirano T
Shizuoka Univ. Shizuoka Jpn
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Hirano T
Toppan Printing Co. Ltd.
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Hirano Tatsumi
Hitachi Research Laboratory Hitachi Ltd.
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Kimoto Koji
Hitachi Research Laboratory Hitachi Ltd
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