(Ba, Sr)TiO_3 Stacked Capacitor Technology for 0.13μm-DRAMs and Beyond
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概要
- 論文の詳細を見る
- 1999-09-20
著者
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Hieda Katsuhiko
Microelectronics Engineering Laboratory Semiconductor Company Toshiba Corporation
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Aoyama T
Toshiba Corp. Yokohama Jpn
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Aoyama T
Hitachi Ltc. Ibaraki Jpn
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Aoyama Tomonori
Microelectronics Engineering Laboratory Semiconductor Company Toshiba Corporation
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ARIKADO Tsunetoshi
Microelectronics Engineering Laboratory, Semiconductor Company, Toshiba Corporation
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OKUMURA Katsuya
Microelectronics Engineering Laboratory, Toshiba Corporation
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KIYOTOSHI Masahiro
Microelectronics Engineering Laboratory, Semiconductor Company, Toshiba Corporation
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IZUHA Mitsuaki
Microelectronics Engineering Laboratory, Semiconductor Company, Toshiba Corporation
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EGUCHI Kazuhiro
Microelectronics Engineering Laboratory, Semiconductor Company, Toshiba Corporation
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NAKAHIRA Junya
Technology Development Division, Semiconductor Group, Fujitsu Limited
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NAKABAYASHI Masaaki
Technology Development Division, Semiconductor Group, Fujitsu Limited
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YAMAZAKI Soichi
Microelectronics Engineering Laboratory, Semiconductor Company, Toshiba Corporation
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TSUNODA Kohji
Fujitsu Laboratories Limited
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LIN Jun
Technology Development Division, Semiconductor Group, Fujitsu Limited
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NAKAMURA Kenro
Microelectronics Engineering Laboratory, Semiconductor Company, Toshiba Corporation
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NIWA Syoko
Microelectronics Engineering Laboratory, Semiconductor Company, Toshiba Corporation
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TOMITA Hiroshi
Microelectronics Engineering Laboratory, Semiconductor Company, Toshiba Corporation
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SHIMADA Akihiro
Technology Development Division, Semiconductor Group, Fujitsu Limited
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KOHYAMA Yusuke
Microelectronics Engineering Laboratory, Semiconductor Company, Toshiba Corporation
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ISHIBASHI Yutaka
Microelectronics Engineering Laboratory, Semiconductor Company, Toshiba Corporation
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FUKUZUMI Yoshiaki
Microelectronics Engineering Laboratory, Semiconductor Company, Toshiba Corporation
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Nakajima Kensuke
Research Institute Of Electrical Communication Tohoku University
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Niwa Shoko
Microelectronics Engineering Laboratory Semiconductor Company Toshiba Corporation
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Arikado T
Semiconductor Leading Edge Technologies Inc.
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Kohyama Yusuke
Microelectronics Engineering Laboratory Semiconductor Company Toshiba Corporation
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Okumura Katsuya
Process And Manufacturing Engineering Center Semiconductor Company Toshiba Corp.:(present)university
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Izuha Mitsuaki
Microelectronics Engineering Laboratory Semiconductor Company Toshiba Corporation
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Lin Jun
Technology Development Division Semiconductor Group Fujitsu Limited
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Nakahira Junya
Technology Development Division Semiconductor Group Fujitsu Limited
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Yamazaki S
Toshiba Corp. Yokohama Jpn
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Shimada Akihiro
Technology Development Division Semiconductor Group Fujitsu Limited
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Eguchi K
Tokyo Metropolitan Univ. Tokyo Jpn
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Kiyotoshi Masahiro
Microelectronics Engineering Laboratory Semiconductor Company Toshiba Corporation
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Fukuzumi Yoshiaki
Microelectronics Engineering Laboratory Semiconductor Company Toshiba Corporation
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Nakabayashi Masaaki
Technology Development Division Semiconductor Group Fujitsu Limited
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Ishibashi Yutaka
Microelectronics Engineering Laboratory Semiconductor Company Toshiba Corporation
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Tomita Hiroshi
Microelectronics Engineering Laboratory Semiconductor Company Toshiba Corporation
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Arikado Tunetoshi
Microelectronics Engineering Laboratory Semiconductor Company Toshiba Corporation
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