Quantitative Analysis of Trace Water in Monosilane Gas Using Atmospheric-Pressure Ionization Mass Spectrometer with Bicompartment Ion Source
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概要
- 論文の詳細を見る
Quantitative analysis of trace amount of water at the ppb level or less in monosilane gas was conducted using an atmospheric-pressure ionization mass spectrometer with a bicompartment ion source which prevents Si compound deposition in the ion source. Water ion which is not detected in the usual form of H_2O^+ due to the lower ionization potential of SiH^+_3 than that of H_2O^+, was detected as cluster ions (SiH_3OH_2)^+, (SiH_3OH_2H_2O)^+, (Si_2H_5OH_2)^+ and (Si_2H_5OH_2H_2O)^+. These ions were identified by the collision-induced dissociation method. The intensity of each of these ions changed with monosilane concentration. An independent calibration curve of monosilane concentration was obtained from the total intensity of these ions. In this raw monosilane gas, about 20 ppb of water was detected. This was decreased to 2.5 ppb upon using an adsorption-type purifier. The detection limit (S/N) was estimated to be 5 ppt.
- 社団法人応用物理学会の論文
- 1995-12-15
著者
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Iijima S
Fundamental Research Laboratories Nec Corporation
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Iijima Sumio
Fundamental Research Laboratories Nec Corporation
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MITSUI Yasuhiro
Semiconductor & Integrated Circuits Division, Hitachi Ltd.
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Hasumi K
Tokyo Noko Univ. Tokyo Jpn
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Irie T
Kyoto Univ. Kyoto Jpn
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Iijima Shimpei
Central Research Laboratory Hitachi Ltd.
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IRIE Takashi
Central Research Laboratory, Hitachi Ltd.
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Mitsui Y
Semiconductor & Integrated Circuits Division Hitachi Ltd.
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MIZOKAMI Kazuaki
EED, Hitachi Tokyo Electronics Co., Ltd.
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HASUMI Keiji
EED, Hitachi Tokyo Electronics Co., Ltd.
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KURIYAMA Katsumi
EED, Hitachi Tokyo Electronics Co., Ltd.
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KURIYAMA Katsumi
Sales and Marketing Division, Hitachi Tokyo Electronics Co., Ltd.
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Kuriyama Katsumi
Sales And Marketing Division Hitachi Tokyo Electronics Co. Ltd.
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Mizokami Kazuaki
Precision Center Hitachi Tokyo Electronics Co. Ltd.
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