Influence of Oxygen upon Radiation Durability of SiN X-ray Mask Membranes
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1990-10-20
著者
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Oizumi H
Hitachi Ltd. Tokyo Jpn
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Oizumi Hiroaki
Central Research Laboratory Hitachi Ltd.
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Oizumi H
Aset Euvl Lab. Kanagawa Jpn
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Oizumi Hiroaki
Sortec Corporation
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MOCHIJI Kozo
Central Research Laboratory, Hitachi Ltd.
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Iijima S
Fundamental Research Laboratories Nec Corporation
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Iijima Sumio
Fundamental Research Laboratories Nec Corporation
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IIJIMA Shinpei
Central Research Laboratory, Hitachi Ltd
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Iijima Shinpei
Central Research Laboratory Hitachi Ltd
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Mochiji K
Joint Res. Center For Atom Technol. Angstrom Technol. Partnership(jrcat‐atp) Ibaraki Jpn
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Mochiji Kozo
Central Research Laboratory Hitachi Ltd.
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