Polymer Dissolution Characteristics of Radiation-Induced Grafted Resist in X-Ray Lithography
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1991-02-15
著者
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Oizumi Hiroaki
Central Research Laboratory Hitachi Ltd.
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MOCHIJI Kozo
Central Research Laboratory, Hitachi Ltd.
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SOHDA Yasunari
Central Research Laboratory, Hitachi, Ltd.
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Sohda Y
Hitachi Ltd. Tokyo Jpn
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Mochiji Kozo
Central Research Laboratory Hitachi Ltd.
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Sohda Yasunari
Central Research Laboratory Hitachi Ltd.
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MOCHIJI Kozo
Central Research Laboratory, Hitachi, Ltd.
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Sohda Yasunari
Central Research Lab., Hitachi, Ltd., Kokubunji, Tokyo 185-8601, Japan
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