Oizumi Hiroaki | Central Research Laboratory Hitachi Ltd.
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概要
関連著者
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Oizumi Hiroaki
Central Research Laboratory Hitachi Ltd.
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MOCHIJI Kozo
Central Research Laboratory, Hitachi Ltd.
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Mochiji Kozo
Central Research Laboratory Hitachi Ltd.
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Oizumi H
Hitachi Ltd. Tokyo Jpn
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Oizumi H
Aset Euvl Lab. Kanagawa Jpn
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Oizumi Hiroaki
Sortec Corporation
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Mochiji K
Joint Res. Center For Atom Technol. Angstrom Technol. Partnership(jrcat‐atp) Ibaraki Jpn
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Soga Tetsuo
Department Of Electronics Faculty Of Engineering Nagoya University
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OGAWA Taro
Central Research Laboratory, Hitachi Ltd.
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Soga T
Nagoya Inst. Technol. Nagoya Jpn
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Iijima S
Fundamental Research Laboratories Nec Corporation
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Iijima Sumio
Fundamental Research Laboratories Nec Corporation
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IIJIMA Shinpei
Central Research Laboratory, Hitachi Ltd
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Iijima Shinpei
Central Research Laboratory Hitachi Ltd
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SOGA Takashi
Central Research Laboratory, Hitachi, Ltd.
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SAITOH Masayoshi
Central Research Laboratory, Hitachi, Ltd.
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Saitoh Masayoshi
Central Research Laboratory Hitachi Ltd.
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Ogawa Taro
Central Research Laboratory Hitachi Ltd.
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Soga Takashi
Central Research Laboratory Hitachi Limited
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Watanabe Teruo
Futaba Corporation
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Murakami K
静岡大学電子工学研究所
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Watanabe T
Components Development Group Sony Corporation
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Watanabe T
Ritsumeikan Univ. Shiga Jpn
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Watanabe Tetsu
Components Development Group Sony Corporation
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Watanabe T
Tokyo Inst. Technol. Kanagawa Jpn
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Watanabe T
Reserch And Development Division Toto Ltd.
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SOHDA Yasunari
Central Research Laboratory, Hitachi, Ltd.
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KISHIMOTO Akihiko
Central Research Laboratory, Hitachi, Ltd.
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SAKAKIHARA Masahiko
Magnetic and Electronic Materials Research Laboratory, Hitachi Metals, Ltd.
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KAWAI Tetsurou
Magnetic and Electronic Materials Research Laboratory, Hitachi Metals, Ltd.
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KUNIYOSHI Shinji
Semiconductor Design and Development Center, Hitachi, Ltd.
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YAMAGUCHI Sadae
Institute for Materials Research, Tohoku University
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YAMANASHI Hiromasa
ASET EUVL Laboratory
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Watanabe T
Tokyo Univ. Agriculture And Technol. Tokyo Jpn
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Watanabe T
Tohoku Univ. Sendai Jpn
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Watanabe Toshihide
Atr Adaptive Communications Research Laboratories:(present Address)science And Technical Research La
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Sohda Y
Hitachi Ltd. Tokyo Jpn
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MURAKAMI Katsuhiko
R&D Headquarters, Nikon Corporation
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OSHINO Tetsuya
R&D Headquarters, Nikon Corporation
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KINOSHITA Hiroo
Laboratory of Advanced Science and Technology for Industry, Himeji Institute of Technology
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WATANABE Takeo
Laboratory of Advanced Science and Technology for Industry, Himeji Institute of Technology
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NIIBE Masato
Laboratory of Advanced Science and Technology for Industry, Himeji Institute of Technology
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ITO Masaaki
Central Research Laboratory, Hitachi, Ltd.
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YAMANASHI Hiromasa
Central Research Laboratory, Hitachi, Ltd.
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SAITHO Masayoshi
Central Research Laboratory, Hitachi, Ltd.
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Murakami Kouichi
Institute Of Material Science University Of Tsukuba
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Ito M
Aset Euv Laboratory C-o Ntt Atsugi Research Center
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Niibe Masato
Laboratory Of Advanced Science And Technology For Industry Himeji Institute Of Technology
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Kawai Tetsurou
Magnetic And Electronic Materials Research Laboratory Hitachi Metals Ltd.
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Oshino Tetsuya
R&d Headquarters Nikon Corporation
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Oshino Tetsuya
Precision Equipment Company Nikon Corporation
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Kinoshita Hiroo
Laboratory Of Advanced Science And Technology For Industry Himeji Institute Of Technology
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Kishimoto A
Faculty Of Engineering Hiroshima University
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Yamaguchi Sadae
Institute For Materials Research Tohoku University
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Sohda Yasunari
Central Research Laboratory Hitachi Ltd.
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Murakami K
Research Institute Of Electronics Shizuoka University
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Kuniyoshi Shinji
Semiconductor Design And Development Center Hitachi Ltd.
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Yamanashi H
Aset Euvl Laboratory
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Yamanashi Hiromasa
Central Research Laboratory Hitachi Ltd.
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Sakakihara Masahiko
Magnetic And Electronic Materials Research Laboratory Hitachi Metals Ltd.
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Watanabe Takeo
Laboratory Of Advanced Science And Technology For Industry University Of Hyogo
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Ito Masaaki
Central Laboratory Rengo Co. Ltd.
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MOCHIJI Kozo
Central Research Laboratory, Hitachi, Ltd.
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Sohda Yasunari
Central Research Lab., Hitachi, Ltd., Kokubunji, Tokyo 185-8601, Japan
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Yamanashi Hiromasa
Central Research Lab., Hitachi, Ltd., Kokubunji, Tokyo 185-8601, Japan
著作論文
- Polymer Dissolution Characteristics of Radiation-Induced Grafted Resist in X-Ray Lithography
- High-Quality Carbon-Doped Boron Nitride Membrane for X-Ray Lithography Mask
- Ring-Field Extreme Ultraviolet Exposure System Using Aspherical Mirrors
- Influence of Oxygen upon Radiation Durability of SiN X-Ray Mask Membranes : Lithography Technology
- Influence of Oxygen upon Radiation Durability of SiN X-ray Mask Membranes
- X-Ray Mask Technology Utilizing an Optical Stepper
- X-ray Mask Technology utilizing an Optical Stepper : X-Ray Lithography