Ito M | Aset Euv Laboratory C-o Ntt Atsugi Research Center
スポンサーリンク
概要
関連著者
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Ito M
Aset Euv Laboratory C-o Ntt Atsugi Research Center
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YAMANASHI Hiromasa
ASET EUVL Laboratory
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Yamanashi H
Aset Euvl Laboratory
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Ogawa Tohru
Technology Strategy Development Sony Co. Core Technology & Network Company
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Ogawa Tetsuya
Institute For Chemical Research Kyoto University
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Ogawa T
Faculty Of Engineering Takushoku University
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HOKO Hiromasa
ASET EUVL Laboratory
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Takahashi M
Aset Euv Laboratory C-o Ntt Atsugi Research Center
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Okazaki S
Aset Euvl Laboratory
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Hoshino Eiichi
Aset Euv Laboratory C-o Ntt Atsugi Research Center
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Hoshino E
Tokyo Research Laboratories Kao Corporation
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Chiba Akira
Euv Process Technology Research Laboratory Association Of Super-advanced Electronics Technologies (a
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OKAZAKI Shinji
ASET EUVL Laboratory
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ITO Masaaki
Central Research Laboratory, Hitachi, Ltd.
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Lee B
Chonnam National Univ. Kwangjoo Kor
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Chiba A
Euv Process Technology Research Laboratory Association Of Super-advanced Electronics Technologies (a
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HOSHINO Eiichi
ASET EUV Laboratory
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TAKAHASHI Masashi
ASET EUV Laboratory
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LEE Byoung
ASET EUV Laboratory
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ITO Masaaki
ASET EUV Laboratory
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Ito Masaaki
Central Laboratory Rengo Co. Ltd.
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CHIBA Akio
Waseda University
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Chiba Akira
Aset (association Of Super-advanced Electronics Technologies) Euv Process Technology Research Labora
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OGAWA Taro
Central Research Laboratory, Hitachi Ltd.
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Yoneda Takashi
Aset Euv Laboratory
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YAMANASHI Hiromasa
Central Research Laboratory, Hitachi, Ltd.
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OGAWA Taro
ASET EUV Laboratory
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Ogawa Taro
Central Research Laboratory Hitachi Ltd.
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Yoneda T
Aset Euv Laboratory
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Yamanashi Hiromasa
Central Research Laboratory Hitachi Ltd.
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Yamanashi Hiromasa
Central Research Lab., Hitachi, Ltd., Kokubunji, Tokyo 185-8601, Japan
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Yamanashi Hiromasa
ASET (Association of Super-Advanced Electronics Technologies), EUV Process Technology Research Laboratory, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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MATSUMOTO Mutsuyoshi
National Institute of Advanced Industrial Science and Technology
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Takano Yasushi
Department Of Electrical And Electronic Engineering Toyohashi University Of Technology
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Matsuzaka Takashi
Central Research Laboratory Hitachi Ltd.
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Takagi Yuji
Information And Communications Research Center
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Oizumi H
Hitachi Ltd. Tokyo Jpn
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Oizumi Hiroaki
Central Research Laboratory Hitachi Ltd.
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Oizumi H
Aset Euvl Lab. Kanagawa Jpn
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Oizumi Hiroaki
Sortec Corporation
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Takagi Yuji
Information And Communications Research Center Matsushita Electric Industrial Co. Ltd.
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Watanabe Teruo
Futaba Corporation
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Murakami K
静岡大学電子工学研究所
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Takagi Y
Tokyo Inst. Technology Yokohama‐shi Jpn
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Watanabe T
Components Development Group Sony Corporation
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Watanabe T
Ritsumeikan Univ. Shiga Jpn
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Watanabe Tetsu
Components Development Group Sony Corporation
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Watanabe T
Tokyo Inst. Technol. Kanagawa Jpn
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OKAZAKI Shinji
Atsugi Research Center, Association of Super-Advanced Electronics Technologies (ASET), c
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Watanabe T
Reserch And Development Division Toto Ltd.
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SEKITANI Tetsuji
Department of Physical Sciences, Hiroshima University
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TACHIBANA Hiroaki
National Institute of Materials and Chemical Research
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Yamaguchi A
Hitachi Ltd. Tokyo Jpn
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Yamaguchi Atsumi
Ulsi Development Center Mitsubishi Electric Corporation
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OGAWA Tarou
ASET EUVL Laboratory
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MATSUMOTO Mitsuhiro
Nara Prefectural Institute of Public Health
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Watanabe T
Tokyo Univ. Agriculture And Technol. Tokyo Jpn
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Watanabe T
Tohoku Univ. Sendai Jpn
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Watanabe Toshihide
Atr Adaptive Communications Research Laboratories:(present Address)science And Technical Research La
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SATOH Isao
Information and Communications Research Center, Matsushita Electric Industrial Co., Ltd.
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OHARA Shunji
Information and Communications Technology Laboratory, Matsushita Electric Industrial Co., Ltd.
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MURAKAMI Katsuhiko
R&D Headquarters, Nikon Corporation
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OSHINO Tetsuya
R&D Headquarters, Nikon Corporation
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KINOSHITA Hiroo
Laboratory of Advanced Science and Technology for Industry, Himeji Institute of Technology
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WATANABE Takeo
Laboratory of Advanced Science and Technology for Industry, Himeji Institute of Technology
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NIIBE Masato
Laboratory of Advanced Science and Technology for Industry, Himeji Institute of Technology
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Ichinose M
Information And Communications Research Center Matsushita Electric Industrial Co. Ltd.
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Ichinose Makoto
Information & Communications Research Center Matsushita Electric Industrial Co. Ltd.
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TANAKA Kenichiro
Department of Cardiovascular Surgery, Kitakyushu Municipal Medical Center
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YAMAGUCHI Atsuko
Central Research Laboratory, Hitachi, Ltd.
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Ohara Shunji
Information Equipment Research Laboratory Matsushita Electric Industrial Co. Ltd.
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Ohara Shunji
Information And Communications Research Center Matsushita Electric Industrial Co. Ltd.
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TERASAWA Tsuneo
Central Research Laboratory, Hitachi, Ltd.
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Yamaguchi Atsuko
Central Research Laboratory Hitachi Ltd.
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Yamaguchi Atsuko
Association Of Super-advanced Electronics Technologies:(present Address)hitachi Central Laboratory
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Takagi Yoshihiro
Institute For Molecular Science:(present Address) Himeji Technical University Faculty Of Science
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Takagi Yoshihiro
Himeji Institute Of Technology Faculty Of Science
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Okazaki Yasutaka
Department Of Engineering Physics And Mechanics Kyoto University
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Murayama Seiichi
Kanagawa Institute Of Technology
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Okazaki Yukinori
Disk System Division Matsushita Electric Industrial Co. Ltd.
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Murakami Kouichi
Institute Of Material Science University Of Tsukuba
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Matsumoto Michio
Faculty Of Engineering Yamanashi University
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LEE Byoung
Association of Super-Advanced Electronics Technologies, Atsugi Research Center, c
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HOSHINO Eiichi
Association of Super-Advanced Electronics Technologies, Atsugi Research Center, c
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TAKAHASHI Masashi
Association of Super-Advanced Electronics Technologies, Atsugi Research Center, c
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YONEDA Takashi
Association of Super-Advanced Electronics Technologies, Atsugi Research Center, c
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YAMANASHI Hiromasa
Association of Super-Advanced Electronics Technologies, Atsugi Research Center, c
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HOKO Hiromasa
Association of Super-Advanced Electronics Technologies, Atsugi Research Center, c
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RYOO ManHyoung
Association of Super-Advanced Electronics Technologies, Atsugi Research Center, c
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CHIBA Akira
Association of Super-Advanced Electronics Technologies, Atsugi Research Center, c
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ITO Masaaki
Association of Super-Advanced Electronics Technologies, Atsugi Research Center, c
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SUGAWARA Minoru
Association of Super-Advanced Electronics Technologies, Atsugi Research Center, c
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OGAWA Tarou
Association of Super-Advanced Electronics Technologies, Atsugi Research Center, c
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OKAZAKI Sinji
Association of Super-Advanced Electronics Technologies, Atsugi Research Center, c
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HIRANO Naoya
ASET EUVL Laboratory
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OKAZAKI Sinji
ASET EUVL Laboratory
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Yamaguchi A
Sumitomo Electric Ind. Ltd. Yokohama Jpn
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Matsumoto M
National Inst. Materials And Chemical Res. Tsukuba Jpn
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SEKINE Keiichi
Japan Aviation Electronics Industry, Ltd.
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KATAOKA Izumi
Japan Aviation Electronics Industry, Ltd.
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ITO Masaaki
Atsugi Research Center, Association of Super-Advanced Electronics Technologies
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OGAWA Taro
Atsugi Research Center, Association of Super-Advanced Electronics Technologies
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OTAKI Katsura
Atsugi Research Center, Association of Super-Advanced Electronics Technologies
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NISHIYAMA Iwao
Atsugi Research Center, Association of Super-Advanced Electronics Technologies
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Sekine Keiichi
Japan Aviation Electronics Industry Ltd.
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Satoh Isao
Information And Communications Research Center Matsushita Electric Industrial Co. Ltd.
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Niibe Masato
Laboratory Of Advanced Science And Technology For Industry Himeji Institute Of Technology
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Kataoka Izumi
Japan Aviation Electronics Industry Ltd.
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Ryoo Manhyoung
Association Of Super-advanced Electronics Technologies Atsugi Research Center C:o Ntt Telecommunicat
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Oshino Tetsuya
R&d Headquarters Nikon Corporation
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Oshino Tetsuya
Precision Equipment Company Nikon Corporation
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Sugawara Minoru
Euv Process Technology Research Laboratory Association Of Super-advanced Electronics Technologies (a
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Sugawara Minoru
Association Of Super-advanced Electronic Technologies Euv Process Technology Research Laboratory
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ISHIDA Takashi
Information Equipment Research Laboratory, Matsushita Electric Industrial Co., Ltd.
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ITO Motoshi
Information and Communications Research Center, Matsushita Electric Industrial Co., Ltd.
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IMANAKA Ryoichi
Disk System Division, Matsushita Electric Industrial Co., Ltd.
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Okazaki Y
Department Of Engineering Physics And Mechanics Kyoto University
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Kinoshita Hiroo
Laboratory Of Advanced Science And Technology For Industry Himeji Institute Of Technology
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Tanaka Kenichiro
Department Of Cardiovascular Surgery Kitakyushu Municipal Medical Center
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Matsumoto M
Nara Prefectural Institute Of Public Health
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Tagaki Yuji
Information & Communications Research Center Matsushita Electric Industrial Co. Ltd.
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Murakami K
Research Institute Of Electronics Shizuoka University
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Imanaka R
Matsushita Electric Industrial Co. Ltd. Osaka Jpn
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Watanabe Takeo
Laboratory Of Advanced Science And Technology For Industry University Of Hyogo
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Sekitani Tetsuji
Department Of Physical Sciences Hiroshima University
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Ishida Takashi
Information And Communications Research Center Matsushita Electric Industrial Co. Ltd.
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Tanaka Kenichiro
Department Of Materials Science Hiroshima University
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Tanaka Kenichiro
Department Of Cardiovascular Surgery Cardiovascular Center Iizuka Hospital
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Matsuzaka Takashi
Central Research Laboratory Hitachi Ltd.:(present Address)device Development Center Hitachi Ltd.
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Chiba Akira
Association of Super-Advanced Electronics Technologies (ASET) EUVL Laboratory, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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Tachibana Hiroaki
National Institute of Advanced Industrial Science and Technology (AIST)
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Matsumoto Mutsuyoshi
National Chemical Laboratory for Industry
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SEKITANI Tetsuji
Department of Materials Science, Hiroshima University
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Takano Yoshinobu
Advanced Technology Research Laboratories, Nippon Steel Corporation
著作論文
- Ring-Field Extreme Ultraviolet Exposure System Using Aspherical Mirrors
- Approach to Patterning of Extreme Ultraviolet Lithography Masks using Ru Buffer Layer : Surfaces, Interfaces, and Films
- Thermal Behavior along Depth of Extreme Ultraviolet Lithography Mask during Dry Etching : Surfaces, Interfaces, and Films
- Theoretical Analysis of Placement Error due to Absorber Pattern on Extreme Ultraviolet Lithography Mask
- Transmission Electron Microscopy Observation and Simulation Analysis of Defect-Smoothing Effect of Molybdenum/Silicon Multilayer Coating for Extreme Ultraviolet Lithography Masks
- Simulation of Multilayer Defects in Extreme Ultraviolet Masks
- Photon-Stimulated Ion Desorption Measurement of Organosilicon Resist Reactions in Extreme Ultraviolet Lithography
- A High-Density Phase-Change Optical Disk System Possessing Read/Write Compatibility with 90 mm Magneto-Optical Disks
- Evaluation of the Waveguide Effect in Proximity X-Ray Lithography Using an Optical Trace Method