Transmission Electron Microscopy Observation and Simulation Analysis of Defect-Smoothing Effect of Molybdenum/Silicon Multilayer Coating for Extreme Ultraviolet Lithography Masks
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-04-15
著者
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Ogawa T
Faculty Of Engineering Takushoku University
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Ogawa Tohru
Technology Strategy Development Sony Co. Core Technology & Network Company
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YAMANASHI Hiromasa
ASET EUVL Laboratory
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HOKO Hiromasa
ASET EUVL Laboratory
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OKAZAKI Shinji
ASET EUVL Laboratory
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Ogawa Tetsuya
Institute For Chemical Research Kyoto University
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HOSHINO Eiichi
ASET EUV Laboratory
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OGAWA Taro
ASET EUV Laboratory
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TAKAHASHI Masashi
ASET EUV Laboratory
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ITO Masaaki
ASET EUV Laboratory
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SEKINE Keiichi
Japan Aviation Electronics Industry, Ltd.
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KATAOKA Izumi
Japan Aviation Electronics Industry, Ltd.
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Sekine Keiichi
Japan Aviation Electronics Industry Ltd.
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Ito M
Aset Euv Laboratory C-o Ntt Atsugi Research Center
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Takahashi M
Aset Euv Laboratory C-o Ntt Atsugi Research Center
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Okazaki S
Aset Euvl Laboratory
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Kataoka Izumi
Japan Aviation Electronics Industry Ltd.
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Hoshino Eiichi
Aset Euv Laboratory C-o Ntt Atsugi Research Center
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Hoshino E
Tokyo Research Laboratories Kao Corporation
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Yamanashi H
Aset Euvl Laboratory
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Yamanashi Hiromasa
ASET (Association of Super-Advanced Electronics Technologies), EUV Process Technology Research Laboratory, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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