Fabrication of 0.1 μm Patterns Using an Alternating Phase Shift Mask in ArF Excimer Laser Lithography
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1997-12-30
著者
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Kamon K
Assoc. Super‐advsnced Electronics Technol. Kanagawa Jpn
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Kamon K
Kwansei Gakuin Univ. Nishinomiya
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Kamon Kazuya
Yokohama Research Center Association Of Super-advanced Electronics Technologies:(present Address) Ul
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Kamon Kazuya
School Of Science Kwansei Gakuin University
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Ogawa Tohru
Technology Strategy Development Sony Co. Core Technology & Network Company
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OGAWA Tohru
Semiconductor Leading Edge Technologies, Inc.
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Mori S
Department Of Electric And Electrical Engineering School Of Science And Engineering Saga University
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NAKAZAWA Keisuke
Yokohama Research Center, Association of Super-Advanced Electronics Technologies
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UEMATSU Masaya
Semiconductor Leading Edge Technologies, Inc.
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ONODERA Toshio
Yokohama Research Center, Association of Super-Advanced Electronics Technologies
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MORI Shigeyasu
Yokohama Research Center, Association of Super-Advanced Electronics Technologies
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TAKAHASHI Makoto
Yokohama Research Center, Association of Super-Advanced Electronics Technologies
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OHFUJI Takeshi
Yokohama Research Center, Association of Super-Advanced Electronics Technologies
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OHTSUKA Hiroshi
Semiconductor Leading Edge Technologies, Inc.
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SASAGO Masaru
Yokohama Research Center, Association of Super-Advanced Electronics Technologies
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Matsuo T
Semiconductor Leading Edge Technologies Inc
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Takahashi M
Tokyo Univ. Pharmacy And Life Sci. Tokyo Jpn
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Takahashi M
Semiconductor Leading Edge Technologies Inc
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Kamon K
Yokohama Research Center Association Of Super-advanced Electronics Technologies:(present Address) Ul
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Sasago Masaru
Yokohama Research Center Association Of Super-advanced Electronics Technologies:(present Address)uls
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Uematsu M
Ntt Basic Research Laboratories Ntt Corporation
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Ohfuji T
Semiconductor Leading Edge Technologies Inc. (selete)
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Ohtsuka H
Association Of Super-advanced Electronics Technologies:(present) Semiconductor Leading Edge Technolo
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Nakazawa K
Process & Manufacturing Engineering Center Toshiba Co. Semicoundactor Company
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Sasago M
Assoc. Super‐advanced Electronics Technol. Yokohama Jpn
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Sasago M
Matsushita Electric Industrial Corp. Ltd.
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Nakazawa Keisuke
Yokohama Research Center Association Of Super-advanced Electronics Technologies:(present Address)sem
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Uematsu Masaya
NTT Basic Research Laboratories, NTT Corporation
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