Takahashi M | Semiconductor Leading Edge Technologies Inc

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概要

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著作論文

Application of Zirconium Silicon Oxide Films to an Attenuated Phase-Shifting Mask in ArF Lithography
Magnetic Domain Structure of Fe_3Al Alloy with Two-Phase Mixture Studied by Lorentz Microscopy
Study of the Temperature Dependence of the Magnetization Direction in Cobalt Single Crystals by 1 MV Lorentz Electron Microscopy
Stabilization of ZrSi_xO_y Films by Irradiation with an ArF Excimer Laser
Fabrication of 0.1 μm Patterns Using an Alternating Phase Shift Mask in ArF Excimer Laser Lithography
Fabrication of 0.13-μm Device Patterns by Argon Fluoride Excimer Laser Lithography with Practical Resolution Enhancement Techniques
Dissolution Rate Analysis of ArF Resists Based on the Percolation Model
Study of the Bottom Antireflective Coating Process Using a High-Transparency Resist for ArF Excimer Laser Lithography
Challenges to 0.1 μm Resolution Capability in ArF Single Layer Resist Process with Weak Resolution Enhancement Techniques
Effective Diffusion Coefficient and Controlling Process of P Diffusion in Si Based on the Pair Diffusion Models of Vacancy and Interstitial Mechanisms
Bulk Boundary Condition for Numerical Solution of Simultaneous Diffusion Equations of Phosphorus and Point Defects in Silicon
One Bond-Type Migration of Phosphorus in Silicon by Interstitialcy Mechanism
Schematic Model for the Migration of Interstitialcy-Type Self-Interstitial Including the Middle State
Mechanically Stacked GaAs/GaInAsP Dual-Junction Solar Cell with High Conversion Efficiency of More than 31%
5×5cm^2 GaAs and GaInAs Solar Cells with High Conversion Efficiency
Effect of Substrate Orientation on Photoluminescence of GaNAs
Exchange-Coupled Magnetic Bilayer Media for Thermomagnetic Writing and Flux Detection
New Recording Method Combining Thermo-Magnetic Writing and Flux Detection
Collective Molecular Motion during V-Shaped Switching in a Smectic Liquid Crystal
Metalorganic Vapor Phase Epitaxial Growth of GaNAs Using Tertiarybutylarsine (TBA) and Dimethylhydrazine (DMHy)
Deep-Submicron Single-Gate Complementary Metal Oxide Semiconductor (CMOS) Technology Using Channel Preamorphization
Deep-Submicron Single-Gate CMOS Technology Using Channel Preamorphization
High Storage Density Optical Recording with a Stable Micro Green Second Harmonic Generation Laser Consisting of Nd:YVO4 and KTP : High Density Recording
High Storage Density Optical Recording with a Stable Micro Green Second Harmonic Generation Laser Consisting of Nd:YVO_4 and KTP
Influence of the Piezoelectric Effect on the Energy Levels of InGaAs/GaAs Strained Quantum Wells Grown on (311)A GaAs
Growth and Characterization of Vertical-Cavity Surface-Emitting Lasers Grown on (311)A-Oriented GaAs Substrates by Molecular Beam Epitaxy
Completely Erasable Phase Change Optical Disc II: Application of Ag-In-Sb-Te Mixed-Phase System for Rewritable Compact Disc Compatible with CD-Velocity and Double CD-Velocity
High Linear Density Recording of 0.3 μm Domain Length on Magneto-Optical Disk : DRIVE TECHNOLOGY II
High-Density Magneto-Optic Disk Using Highly Controlled Pit-Edge Recording : POST DEADLINE PAPERS

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