Metalorganic Vapor Phase Epitaxial Growth of GaNAs Using Tertiarybutylarsine (TBA) and Dimethylhydrazine (DMHy)
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1999-02-28
著者
-
Moto A
Department Of Electrical And Electronic Engineering Kanazawa University
-
Takahashi M
Semiconductor Leading Edge Technologies Inc
-
Tanabe T
Department Of Electronics And Electrical Engineering Faculty Of Science And Technologies Keio Univer
-
Tanabe T
Rhom Co. Ltd. Kyoto Jpn
-
Tanabe Takaya
Ntt Cyber Space Laboratories Ntt Corporation
-
MOTO Akihiro
Basic High-Technology Laboratories, Sumitomo Electric Industries, Ltd.
-
TANAKA So
Basic High-Technology Laboratories, Sumitomo Electric Industries, Ltd.
-
IKOMA Nobuyuki
Optoelectronics R&D Laboratories, Sumitomo Electric Industries, Ltd.
-
TANABE Tatsuya
Basic High-Technology Laboratories, Sumitomo Electric Industries, Ltd.
-
TAKAGISHI Shigenori
Basic High-Technology Laboratories, Sumitomo Electric Industries, Ltd.
-
TAKAHASHI Mitsuo
Optoelectronics R&D Laboratories, Sumitomo Electric Industries, Ltd.
-
KATSUYAMA Tsukuru
Optoelectronics R&D Laboratories, Sumitomo Electric Industries, Ltd.
-
Ikoma Nobuyuki
Optoelectronics R&d Laboratories Sumitomo Electric Industries Ltd.
-
Katsuyama Tsukuru
Optoelectronics R&d Laboratories Sumitomo Electric Industries Ltd.
-
Tanabe T
Department Of Electric And Electronic Engineering Ibazuki University
-
Moto Akihiro
The Authors Are With The Research Center For Superconductor Photonics Osaka University
-
Takahashi Minoru
Ceramic Engineering Research Laboratory Nagoya Institute Of Technology
-
Tanaka So
Transmission Devices R&D Laboratories, Sumitomo Electric Industries, Ltd.
-
Takagishi Shigenori
Transmission Devices R&D Laboratories, Sumitomo Electric Industries, Ltd.
-
Katsuyama Tsukuru
Optoelectronic Industry and Technology Development Association (OITDA), 1 Taya-cho, Sakae-ku, Yokohama 244-8588, Japan
関連論文
- Effect of Oxygen Pressure on (Ba_xSr_)TiO_3 Thin Films by Pulsed Laser Ablation
- Application of Zirconium Silicon Oxide Films to an Attenuated Phase-Shifting Mask in ArF Lithography
- Magnetic Domain Structure of Fe_3Al Alloy with Two-Phase Mixture Studied by Lorentz Microscopy
- Study of the Temperature Dependence of the Magnetization Direction in Cobalt Single Crystals by 1 MV Lorentz Electron Microscopy
- Scaling Relations for the Production and Acceleration of a J×B Driven Rotating Plasma
- Recent Results of Rotating Plasma Experiments for Isotope Separation
- Control of Ion Energy for Low-Damage Plasma Processing in RF Discharge
- Stabilization of ZrSi_xO_y Films by Irradiation with an ArF Excimer Laser
- Fabrication of 0.1 μm Patterns Using an Alternating Phase Shift Mask in ArF Excimer Laser Lithography
- Fabrication of 0.13-μm Device Patterns by Argon Fluoride Excimer Laser Lithography with Practical Resolution Enhancement Techniques
- Dissolution Rate Analysis of ArF Resists Based on the Percolation Model
- Study of the Bottom Antireflective Coating Process Using a High-Transparency Resist for ArF Excimer Laser Lithography
- Challenges to 0.1 μm Resolution Capability in ArF Single Layer Resist Process with Weak Resolution Enhancement Techniques
- Effective Diffusion Coefficient and Controlling Process of P Diffusion in Si Based on the Pair Diffusion Models of Vacancy and Interstitial Mechanisms
- Bulk Boundary Condition for Numerical Solution of Simultaneous Diffusion Equations of Phosphorus and Point Defects in Silicon
- One Bond-Type Migration of Phosphorus in Silicon by Interstitialcy Mechanism
- Thermal Equilibration of Defect Density in Hydrogenated Amorphous Silicon-Germanium Alloys
- Comparison between ESR and CPM for the Gap States in a-Si-Ge:H
- Feasibility Study on High Data Transfer Rate of 300 Mbit / s with 8-Beam Laser Diode Array
- Readout Wave form Equalization in Pulse-Width-Modulated Optical Recording : High Density Recording
- Readout Waveform Equalization in Pulse-Width-Modulated Optical Recording
- Temperature Simulation of Cooling Process of Ge Droplets in Laser Droplet Epitaxy(Surfaces, Interfaces, and Films)
- Preparation of Twin- and Crack-Free LiNbO_3 Films by Pulsed Laser Ablation Using Nucleation Process at High Temperature : Surfaces, Interfaces, and Films
- Rotational Honeycomb Epitaxy of Ru Thin Films on Sapphire (0001) Substrate : Surfaces, Interfaces, and Films
- Preparation of Pb(Zn_Ti_)O_3 Films by Laser Ablation
- Thermal Analysis of Target Surface in the Ba-Y-Cu-O Film Preparation by Laser Ablation Method
- Preparation of Ba-Y-Cu-O Superconducting Films by Laser Ablation with and without Laser Irradiation on Growing Surface : Special Section : Solid State Devices and Materials 2 : Thin Film Devices and Superconductors
- a-Si_O_x:H Films Prepared by Direct Photo-CVD Using CO_2 Gas : Condensed Matter
- Preparation of Ba_2YCu_3O_x Superconducting Films by Laser Evaporation and Rapid Laser Annealing : Electrical Properties of Condensed Matter
- Novel fabrication route for porous ceramics using waste materials by non-firing process
- Two-Dimensional Modulation Code for Multilayered Waveguide Holographic Memory
- Preparation of Bi-Iron-Garnet Films on Platinized Si Substrate with Bi-Substituted Y-Iron-Garnet Template Layer (レーザーによる薄膜形成と制御小特集号)
- Mechanism of Stoichiometric Deposition of Volatile Elements in Multimetal-Oxide Films Prepared by Pulsed Laser Ablation
- Annealing Temperature Dependence of MgO Substrates on the Quality of YBa_2Cu_3O_x Films Prepared by Pulsed Laser Ablation
- Schematic Model for the Migration of Interstitialcy-Type Self-Interstitial Including the Middle State
- Mechanically Stacked GaAs/GaInAsP Dual-Junction Solar Cell with High Conversion Efficiency of More than 31%
- 5×5cm^2 GaAs and GaInAs Solar Cells with High Conversion Efficiency
- Effect of Substrate Orientation on Photoluminescence of GaNAs
- Exchange-Coupled Magnetic Bilayer Media for Thermomagnetic Writing and Flux Detection
- New Recording Method Combining Thermo-Magnetic Writing and Flux Detection
- Collective Molecular Motion during V-Shaped Switching in a Smectic Liquid Crystal
- Metalorganic Vapor Phase Epitaxial Growth of GaNAs Using Tertiarybutylarsine (TBA) and Dimethylhydrazine (DMHy)
- Deep-Submicron Single-Gate Complementary Metal Oxide Semiconductor (CMOS) Technology Using Channel Preamorphization
- Deep-Submicron Single-Gate CMOS Technology Using Channel Preamorphization
- High Storage Density Optical Recording with a Stable Micro Green Second Harmonic Generation Laser Consisting of Nd:YVO4 and KTP : High Density Recording
- High Storage Density Optical Recording with a Stable Micro Green Second Harmonic Generation Laser Consisting of Nd:YVO_4 and KTP
- Preparation of fine mullite powders with high surface area by agglomeration control of alkoxide-derived precursor sol
- Adaptive Pulse Shaping of Femtosecond Laser Pulses in Amplitude and Phase through a Single-Mode Fiber by Referring to Frequency-Resolved Optical Gating Patterns(Optics and Quantum Electronics)
- Oxygen-Doped Si Epitaxial Film (OXSEF)
- Terahertz Radiation Imaging of Vortex Penetration into YBCO Thin Films with and without Ordered Arrays of Antidots(Special Issue on Superconductive Electronics)
- Temperature-Independent Photoluminescence in Amorphous Si_C_x:(F,H) Films with Low Defect Density
- Graphitization behavior of polymer in the gelcasted alumina by sintering
- Effect of mixing condition of additives on the solidification of green body by gelcasting method
- Morphological control of ZnO particles synthesized via a new and facile aqueous solution route
- Effect of initial pH on formation of hollow calcium carbonate particles by continuous CO_2 gas bubbling into CaCl_2 aqueous solution
- Water absorption and retention of porous ceramics fabricated by waste resources( Innovative Ceramic Materials and Technologies for Global Environmental Protection)
- Properties of Hydrogenated Amorphous Si-N Prepared by Various Methods
- Thin Film Patterning by Laser Lift-Off
- Electron-Beam-Induced Nucleation Centers and Selective Deposition of Thin Zinc Films
- Preparation of Epitaxial Ge Film on Si by Pulsed Laser Ablation Using Molten Droplets
- Removal of Surface Oxides on Copper by Pulsed Laser lrradiation
- Surface Treatment by Ar Plasma Irradiation in Electron Cyclotron Resonance Chemical Vapor Deposition
- Influence of the Piezoelectric Effect on the Energy Levels of InGaAs/GaAs Strained Quantum Wells Grown on (311)A GaAs
- Low-Damage Indium Phosphide Sidewall Formation by Reactive Ion Etching
- Multi-Beam Read-Verifying Optical Head for Parallel Recording
- Crosstalk-Suppressed Readout System Using Shading Band
- Three-Track Readout Method Using Two Offset Beams
- Crystallization Characteristics of Phase-Change Optical Disks
- Crystallization Characteristics of Phase-Change Media by Laser Pulse-Train Irradiation
- Magneto-Optical Characteristics of Bi-Substituted Rare-Earth Iron Garnet Films Prepared by Laser Ablation
- Preparation of Pb(Zr, Ti)O_3 Films on Si Substrate by Laser Ablation
- Influence of Laser Fluence on Structural and Ferroelectric Properties of Lead-Zirconate-Titanate Thin Films Prepared by Laser Ablation : Thin Films
- Annealing Studies on Hydrogenated Amorphous Silicon-Tin Films
- ESR and Raman Studies on Hydrogenated Amorphous Si-Sn
- Growth and Characterization of Vertical-Cavity Surface-Emitting Lasers Grown on (311)A-Oriented GaAs Substrates by Molecular Beam Epitaxy
- Spectroscopic Study on N_O-Plasrma Oxidation of Hydrogenated Amorphous Silicon and Behavior of Nitrogen
- Scanning Tunneling Microscopy of Initial Stages of GaAs Heteroepitaxy on Lattice-Mismatched Substrates
- Role of Steps in GaAs Heteroepitaxial Growth on InAs(001) Surfaces
- Step Structures on Vicinal InAs (001) under (2×4) and (4×2) Surface Reconstructions
- Straight Step Edge Formation on an InAs(001) Vicinal Surface by the Transition of Surface Reconstruction
- Shape Transition of GaAs Islands Grown on InAs (001) Surfaces
- InAs Island Formation Aligned along the Steps on a GaAs(001) Vicinal Surface
- Effect of Charged Defects on Properties of Amorphous Si-Based Alloys
- Completely Erasable Phase Change Optical Disc II: Application of Ag-In-Sb-Te Mixed-Phase System for Rewritable Compact Disc Compatible with CD-Velocity and Double CD-Velocity
- High Linear Density Recording of 0.3 μm Domain Length on Magneto-Optical Disk : DRIVE TECHNOLOGY II
- Reduction of Droplet Formatiom by Reducing Target Etching Rate in Pulsed Laser Ablation
- Laser-Irradiation Induced a-Axis Orientation in c-Axis-Oriented YBa_2Cu_3O_x Films Prepared by Pulsed Laser Ablation
- ESR and X-Ray Diffraction Studies on Ba-Y-Cu-O Superconductors : Electrical Properties of Condensed Matter
- Preparation of Ti-Al-N Electrode Films by Pulsed Laser Ablation for Lead-Zirconate-Titanate Film Capacitors
- Highty Oriented Pb(Zr, Ti)O_3 Thin Films Prepared by Pulsed Laser Ablation GaAs and Si Substrates with MgO Buffer Layer
- Fatigue Behavior in Lead-Zirconate-Titanate Thin-Film Capacitors Prepared by Pulsed Laser Ablation on Ni-Alloy Electrodes
- NH_3-Plasma-Nitridation Process of (100) GaAs Surface Observed by Angle-Dependent X-Ray Photoelectron Spectroscopy
- High-Density Magneto-Optic Disk Using Highly Controlled Pit-Edge Recording : POST DEADLINE PAPERS
- Light-Induced Effects and Their Annealing Behavior in a-Si:H
- Effect of Reduction in Impurity Content for a-Si:H Films
- ESR and Constant Photocurrent Studies of Surface and Bulk Defects in a-Si:H
- Hydrogen Evolution from Amorphous Si-N Films
- Light-Induced Effects in a-Si:H Studied by ESR and Electrical Measurements
- Closely Spaced Independently Addressable Dual-Beam Visible Lasers with Strained GaInP Quantum Wells
- Structural Analysis on T_c Variation of Bi_2Sr_Ca_Cu_2O_