Oxygen-Doped Si Epitaxial Film (OXSEF)
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1987-11-20
著者
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Tabe Michiharu
Ntt Electrical Communications Laboratories Nippon Telegraph And Telephone Corporation
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SAKAKIBARA Yutaka
NTT Electrical Communications Laboratories, Nippon Telegraph and Telephone Corporation
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Tabe Michiharu
Ntt Electrical Communication Laboratories
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TAKAHASHI Mitsutoshi
NTT Electrical Communication Laboratories
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Sakakibara Y
National Institute Of Advanced Industrial Science And Technology (aist)
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Sakakibara Yutaka
Ntt Electrical Communication Laboratories
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Takahashi Minoru
Ceramic Engineering Research Laboratory Nagoya Institute Of Technology
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- Oxygen-Doped Si Epitaxial Film (OXSEF)
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