Effects of Substrate-Surface Cleaning on Solid Phase Epitaxial Si Films

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概要

著者

Tabe Michiharu
Ntt Electrical Communications Laboratories Nippon Telegraph And Telephone Corporation
KUNII Yasuo
NTT Electrical Communications Laboratories, Nippon Telegraph and Telephone Corporation
SAKAKIBARA Yutaka
NTT Electrical Communications Laboratories, Nippon Telegraph and Telephone Corporation
Tabe Michiharu
Ntt Electrical Communication Laboratories
Kunii Yasuo
Ntt Electrical Communications Laboratories Nippon Telegraph And Telephone Corporation
Sakakibara Yutaka
Ntt Electrical Communications Laboratories Nippon Telegraph And Telephone Corporation
Sakakibara Yutaka
Ntt Electrical Communication Laboratories

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