Influence of Laser Fluence on Structural and Ferroelectric Properties of Lead-Zirconate-Titanate Thin Films Prepared by Laser Ablation : Thin Films

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概要

• 論文の詳細を見る

• Ferroelectric lead-zirconate-titanate (PZT) thin films were deposited by excimer laser ablation on (100) MgO substrates with and without an electrode. The film conposition was approximately the same as that of the target over a laser fluence range of 2.6 and 10 J/cm^2・shot. Increase in the laser fluence enhances the film deposition rate and the crystallite size. In representative experiments, the remanent polarization and coercive field of the film prepared at a laser fluence of 9.2 J/cm^2・shot were 28μC/cm^2 and 72 kV/cm, respectively.

• 社団法人応用物理学会の論文
• 1991-09-30

著者

• MORIMOTO Akiharu

  Department of Electrical and Computer Engineering, Faculty of Engineering, Kanazawa University

• SHIMIZU Tatsuo

  Department of Electrical and Computer Engineering, Faculty of Engineering, Kanazawa University

• Moto A

  Department Of Electrical And Electronic Engineering Kanazawa University

• OGAWA Toshio

  Murata Manufacturing Co., Ltd.

• Shimizu T

  Chiba Univ. Chiba Jpn

• YASHIMA Hideyuki

  Department of Electrical and Computer Engineering, Faculty of Technology, Kanazawa University

• KIDOH Hideo

  Murata Manufacturing Co., Lid.

• Kidoh Hideo

  Department Of Electrical And Computer Engineering Faculty Of Technology Kanazawa University:(permane

• Yashima Hideyuki

  Department Of Electrical And Computer Engineering Faculty Of Technology Kanazawa University:(present

• Shimizu Tatsuo

  Department Of Applied Physics University Of Tokyo

• Ogawa Toshio

  Murata Manufacturing Co. Ltd.

• Ogawa Toshio

  Murata Mfg. Co. Ltd.

• Morimoto Akiharu

  Department of Electrical and Computer Engineering, Faculty of Engineering,

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