Fatigue Behavior in Lead-Zirconate-Titanate Thin-Film Capacitors Prepared by Pulsed Laser Ablation on Ni-Alloy Electrodes

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概要

• 論文の詳細を見る

• Ferroelectric lead-zirconate-titanate (Pb(Zr_<0.52>Ti_<0.48>) O_3: PZT) thin-film capacitors were fabricated by pulsed laser ablation using Ni-alloy electrodes on oxidized (100) silicon. Polarization fatigue after a large number of switchings was investigated with a variety of frequencies. The frequencies for acceleration of fatigue and for measurement of the switched charge density Q_<sw> were varied simultaneously or independently. The fatigue test revealed that the increase in the frequency both for acceleration and measurement of switching pulse increases the life of polarization reversal while it decreases Q_<sw>. At 50 kHz, Q_<sw> keeps the initial value even after switching above 10^<10> cycles. The measurement frequency dependence of Q_<sw> suggests that a homogeneous fatigue takes place irrespective of fast and slow domains and additional layers of a low dielectric constant are probably formed in the ferroelectric-metal interface.

• 社団法人応用物理学会の論文
• 1995-08-15

著者

• MORIMOTO Akiharu

  Department of Electrical and Computer Engineering, Faculty of Engineering, Kanazawa University

• SHIMIZU Tatsuo

  Department of Electrical and Computer Engineering, Faculty of Engineering, Kanazawa University

• YAMANAKA Yasuhiro

  Department of Electrical and Computer Engineering, Faculty of Engineering, Kanazawa University

• Moto A

  Department Of Electrical And Electronic Engineering Kanazawa University

• Shimizu Tadao

  Department Of Physics University Of Tokyo

• Shimizu T

  Department Of Electrical And Electronic Engineering Kanazawa University

• Shimizu T

  Chiba Univ. Chiba Jpn

• Moto Akihiro

  The Authors Are With The Research Center For Superconductor Photonics Osaka University

• Yonezawa Y

  Industrial Research Institute Of Ishikawa

• Yamanaka Y

  Nec Corp. Kawasaki Jpn

• Shimizu Tatsuo

  Department Of Applied Physics University Of Tokyo

• Yamanaka Yasuhiro

  Department Of Applied Chemistry And Bioengineering Graduate School Of Engineering Osaka City University

• Morimoto Akiharu

  Department of Electrical and Computer Engineering, Faculty of Engineering,

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