Evidence of the Existence of SiF_4 Molecules in Fluorinated Amorphous Silicon
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概要
- 論文の詳細を見る
Evidence of the existence of a large number of SiF_4 molecules is derived from the measurement of nuclear magnetic resonance of fluorine atoms at liquid He temperature for fluorinated amorphous silicon prepared by rf sputtering.
- 社団法人応用物理学会の論文
- 1984-08-20
著者
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SHIMIZU Tatsuo
Department of Electrical and Computer Engineering, Faculty of Engineering, Kanazawa University
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Kumeda M
Kanazawa Univ. Kanazawa Jpn
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Kumeda Minoru
Department Of Electrical And Computer Engineering Faculty Of Engineering Kanazawa University
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YONEZAWA Yasuto
Department of Electrical and Computer Engineering, Kanazawa University
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Shimizu T
Chiba Univ. Chiba Jpn
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Yonezawa Y
Industrial Research Institute Of Ishikawa
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Shimizu Tatsuo
Department Of Applied Physics University Of Tokyo
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