Highty Oriented Pb(Zr, Ti)O_3 Thin Films Prepared by Pulsed Laser Ablation GaAs and Si Substrates with MgO Buffer Layer
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概要
- 論文の詳細を見る
Highly [100]-oriented Pb(Zr, Ti)O_3 (PZT) films were prepared on (100) GaAs and (100) Si substrates with MgO buffer layer by pulsed laser ablation (PLA). The depth profile of the constituent elements observed by X-ray photo-electron spectroscopy (XPS) shows that there are no remarkable interdiffusion and/or no formation of an alloying layer at both interfaces between PZT and MgO and between MgO and GaAs substrate. The [100]-oriented perovskite PZT films which exhibit the ferroelectric hysteresis loop were obtained on (100) Si substrate with MgO buffer layer with the thickness of only 50 A^°, showing that this technique promises the realization of metal-ferroelectric-semiconductor field-effect transistors (MFS-FETs).
- 社団法人応用物理学会の論文
- 1995-09-30
著者
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MASUDA Atsushi
Department of Pathology and Cell Regulation, Kyoto Prefectural University of Medicine
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MASUDA Atsushi
Japan Advanced Institute of Science and Technology
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YONEZAWA Yasuto
Industrial Research Institute of Ishikawa (IRII)
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MORIMOTO Akiharu
Department of Electrical and Computer Engineering, Faculty of Engineering, Kanazawa University
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SHIMIZU Tatsuo
Department of Electrical and Computer Engineering, Faculty of Engineering, Kanazawa University
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YAMANAKA Yasuhiro
Department of Electrical and Computer Engineering, Faculty of Engineering, Kanazawa University
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Moto A
Department Of Electrical And Electronic Engineering Kanazawa University
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Shimizu Tadao
Department Of Physics University Of Tokyo
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Shimizu T
Department Of Electrical And Electronic Engineering Kanazawa University
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Masuda A
Japan Advanced Institute Of Science And Technology
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Shimizu T
Chiba Univ. Chiba Jpn
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Moto Akihiro
The Authors Are With The Research Center For Superconductor Photonics Osaka University
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Yonezawa Y
Industrial Research Institute Of Ishikawa
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Yonezawa Yasuto
Industrial Research Institute Of Ishikawa
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TAZOE Mitsutoshi
Department of Electrical and Computer Engineering, Faculty of Engineering, Kanazawa University
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Masuda Atsushi
Department Of Neurosurgery Shimizu Hospital
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Tazoe Mitsutoshi
Department Of Electrical And Computer Engineering Faculty Of Engineering Kanazawa University
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Shimizu Tatsuo
Department Of Applied Physics University Of Tokyo
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Masuda Atsushi
Department Of Neurosurgery Eisyokai Yoshida Hospital
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Yamanaka Yasuhiro
Department Of Applied Chemistry And Bioengineering Graduate School Of Engineering Osaka City University
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Masuda Atsushi
Department of Electrical and Computer Engineering, Faculty of Engineering,
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Morimoto Akiharu
Department of Electrical and Computer Engineering, Faculty of Engineering,
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