Improvement of Deposition Rate by Sandblasting of Tungsten Wire in Catalytic Chemical Vapor Deposition
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概要
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The effects of sandblasting of tungsten wires were investigated to increase the deposition rate in catalytic chemical vapor deposition (Cat-CVD). The tungsten wires were sandblasted using silicon carbide powder. Both the surface area and surface roughness increased by this treatment. The deposition rate increased with the surface roughness when the input electric power was kept constant.
- 2005-04-15
著者
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Matsumura Hideki
Japan Advanced Inst. Sci. And Technol. (jaist) Ishikawa Jpn
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MASUDA Atsushi
Japan Advanced Institute of Science and Technology
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TAKANO Masahiro
Industrial Research Institute of Ishikawa (IRII)
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NIKI Toshikazu
Japan Science and Technology Agency (JST)
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HEYA Akira
Industrial Research Institute of Ishikawa (IRII)
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UMEMOTO Hironobu
Japan Advanced Institute of Science and Technology (JAIST)
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DOGUCHI Yoshiteru
Industrial Research Institute of Ishikawa (IRII)
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IZUMI Akira
Japan Advanced Institute of Science and Technology (JAIST)
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Minamikawa Toshiharu
Industrial Research Institute Of Ishikawa
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Muroi Susumu
Ishikawa Seisakusho Ltd.
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Yonezawa Yasuto
Industrial Research Institute Of Ishikawa
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Minami Shigehira
Ishikawa Seisakusho Ltd.
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Niki Toshikazu
Japan Science and Technology Agency (JST), 2-13 Asahidai, Nomi, Ishikawa 923-1211, Japan
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Masuda Atsushi
Japan Advanced Institute of Science and Technology (JAIST), 1-1 Asahidai, Nomi, Ishikawa 923-1292, Japan
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Umemoto Hironobu
Japan Advanced Institute of Science and Technology (JAIST), 1-1 Asahidai, Nomi, Ishikawa 923-1292, Japan
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Minamikawa Toshiharu
Industrial Research Institute of Ishikawa (IRII), 1-2 Kuratsuki, Kanazawa, Ishikawa 920-8203, Japan
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Izumi Akira
Japan Advanced Institute of Science and Technology (JAIST), 1-1 Asahidai, Nomi, Ishikawa 923-1292, Japan
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Heya Akira
Industrial Research Institute of Ishikawa (IRII), 1-2 Kuratsuki, Kanazawa, Ishikawa 920-8203, Japan
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Takano Masahiro
Industrial Research Institute of Ishikawa
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Takano Masahiro
Industrial Research Institute of Ishikawa (IRII), 1-2 Kuratsuki, Kanazawa, Ishikawa 920-8203, Japan
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Doguchi Yoshiteru
Industrial Research Institute of Ishikawa (IRII), 1-2 Kuratsuki, Kanazawa, Ishikawa 920-8203, Japan
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