Development of Micro-Assembling Technology for Fabrication of Large Size Liquid Crystal Displays
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概要
- 論文の詳細を見る
A liquid crystal display (LCD) has two substrates sandwiching a liquid crystal layer. One is a pixel-controlling substrate (PCS or thin-film-transistor-array substrate), and the other is a color filter substrate. This paper is to study the feasibility of a new technology for making PCS. In the technology, many small crystalline silicon ultra large scale integrated circuits (ULSI) chips with a size of a few hundred μm are used for pixel control instead of using the conventional amorphous-silicon thin-film transistor. A new assembling technology for treating μm-size chips, micro-assembling technology (MAT), is particularly investigated as a technology for depositing almost a million of ULSI chips onto proper positions on the substrate. Processes to fabricate PCS by MAT are also investigated. It is found that when the diagonal size of an LCD exceeds 50–100 in., the present technology becomes realistic technically and economically.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-05-30
著者
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Matsumura Hideki
Jaist (japan Advanced Institute Of Science And Technology)
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Minami Shigehira
Ishikawa Seisakusho Ltd.
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Ishikawa Masayuki
JAIST (Japan Advanced Institute of Science and Technology), 1-1 Asahidai, Nomi, Ishikawa 923-1292, Japan
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Kida Kenichiro
JAIST (Japan Advanced Institute of Science and Technology), 1-1 Asahidai, Nomi, Ishikawa 923-1292, Japan
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Terano Minoru
JAIST (Japan Advanced Institute of Science and Technology), 1-1 Asahidai, Nomi, Ishikawa 923-1292, Japan
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Nitta Koh-hei
Kanazawa University, Kakuma, Kanazawa 920-1192, Japan
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Maenaka Koyu
Ishikawa Seisakusho, Ltd., 200 Fukudome, Hakusan, Ishikawa 924-0051, Japan
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Kuno Tadaaki
Kanazawa University, Kakuma, Kanazawa 920-1192, Japan
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