Study on Estimation of Metal Film Thickness by Attenuated Total Reflection

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概要

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• The estimation of thin film thickness by attenuated total reflection (ATR) was proposed. This technique is caused by be fitted curve evaluated from Fresnel's formula to experimental values of reflectivity in the resonance of the resonance dip in reflectivity due to surface plasmon resonance is represented by d_<spr> = D+√<E(R<min>-F)>. The values obtained by this method were compared with those obtained by the surface roughness tester made by the Rank Tayler Hobson Company. From this comparison, the experimental formula d_<srt> = Gd_<spr> + H was proposed, and G and H were obtained as 0.69 and 6.7 respectively for an Ag film, 0.86 and -1.45 respectively for an Au film, and 0.67 and 8.98 respectively for a Cu film, all ranging from about 30 nm to 70 nm in thickness.

• 社団法人応用物理学会の論文
• 1997-05-30

著者

• MINAMIKAWA Toshiharu

  Industrial Research Institute of Ishikawa (IRII)

• Minamikawa Toshiharu

  Industrial Research Institute Of Ishikawa

• TOKUNAGA Yoshiaki

  Kanazawa Institute of Technology

• WATANABE Hirofumi

  Kanazawa Institute of Technology

• MINAMIDE Akiyuki

  Kanazawa Technical College

• Tokunaga Yoshiaki

  Kanazawa Inst. Technol. Ishikawa Jpn

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