Annealing Effect of Pb(Zr, Ti)O_3 Ferroelectric Capacitor in Active Ammonia Gas Cracked by Catalytic Chemical Vapor Deposition System
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1999-09-30
著者
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Matsumura Hideki
Japan Advanced Inst. Sci. And Technol. (jaist) Ishikawa Jpn
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MASUDA Atsushi
Japan Advanced Institute of Science and Technology
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YONEZAWA Yasuto
Industrial Research Institute of Ishikawa (IRII)
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MINAMIKAWA Toshiharu
Industrial Research Institute of Ishikawa (IRII)
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Minamikawa Toshiharu
Japan Advanced Institute of Science and Technology
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Nakamura Takashi
Japan Advanced Institute of Science and Technology
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Fujimori Yoshikazu
Japan Advanced Institute of Science and Technology
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Matsumura Hideki
School Of Materials Science Japan Advanced Institute Of Science And Technology (jaist)
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Masuda A
Japan Advanced Institute Of Science And Technology
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Miura T
Environmental Health Sciences Division National Lnstitute For Environmental Studies:(present Address
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Yonezawa Y
Industrial Research Institute Of Ishikawa
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Yonezawa Yasuto
Industrial Research Institute Of Ishikawa
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Fujimori Yoshikazu
Japan Advanced Institute Of Science And Technology:rohm Co. Ltd.
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Matsumura Hideki
School of Materials Science, Japan Advanced Institute of Science and Technology (JAIST)
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