Properties of Hydro-Fluorinated Amorphous Silicon-Carbide Produced by Intermediate Species SiF_2

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1985-10-20

著者

• Matsumura H

  Japan Advanced Inst. Of Sci. And Technol. (jaist) Ishikawa Jpn

• Matsumura H

  Japan Advanced Inst. Sci. And Technol. Ishikawa Jpn

• Uesugi T

  Waseda Univ. Tokyo Jpn

• UESUGI TAKASHI

  Department of Biopharmacy, Meiji College of Pharmacy

• Matsumura Hideki

  Department Of Applied Electronics Tokyo Institute Of Technology

• IHARA Hisanori

  Department of Physical Electronics, Hiroshima University

• Ihara H

  Toshiba Research & Development Center Toshiba Corporation

• Uesugi Takashi

  Department Of Biopharmacy Meiji Coll. Of Pharmacy

• Matsumura Hideki

  School of Materials Science, Japan Advanced Institute of Science and Technology (JAIST)

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