Theoretical Considerations in Lateral Damage Distribution Formed by Ion-Implantation
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1975-11-05
著者
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Matsumura Hideki
Department Of Applied Electronics Tokyo Institute Of Technology
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FURUKAWA Seijiro
Department of Physical Electronics, Faculty of Engineering, Tokyo Institute of Technology
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Matsumura Hideki
Department Of Electronics And Systems Faculty Of Coordinated Sciences Tokyo Institute Of Technology
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Furukawa Seijiro
Department Of Applied Electronics Interdisciplinary Graduate School Of Science And Engineering Tokyo
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Furukawa Seijiro
Department Of Applied Electronics Graduate School Of Science And Technology
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Furukawa Seijiro
Department Of Electronics And Systems Faculty Of Coordinated Sciences Tokyo Institute Of Technology
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