Experimental Simulation on the Beam Heating Effects in Ion Implantation Techniques
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1973-07-05
著者
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INOUE Osamu
Department of Clinical and Laboratory Medicine, Faculty of Medicine, University of Yamanashi
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Ishiwara Hiroshi
Department Of Applied Electronics Tokyo Institute Of Technology
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Furukawa Seijiro
Department Of Applied Electronics Graduate School Of Science And Technology
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Inoue Osamu
Department Of Clinical And Laboratory Medicine Faculty Of Medicine University Of Yamanashi
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Inoue Osamu
Department Of Physical Electronics Faculty Of Engineering Tokyo Institute Of Technology
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Ishiwara Hiroshi
Department of Advanced Applied Electronics, Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226-8502, Japan
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Inoue Osamu
Department of Chemistry, Faculty of Science, Toyama University
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