The Lattice Location of Phosphorus Atoms Implanted into Silicon
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1976-02-05
著者
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Ishiwara Hiroshi
Department Of Applied Electronics Tokyo Institute Of Technology
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Furukawa Seijiro
Department Of Applied Electronics Interdisciplinary Graduate School Of Science And Engineering Tokyo
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Shimizu Tatsuo
Department Of Electronics Faculty Of Technology Kanazawa University
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Shimizu Tatsuo
Department Of Applied Physics University Of Tokyo
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Hasegawa Seiichi
Department Of Electrical And Computer Engineering Faculty Of Technology Kanazawa University
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Furukawa Seijiro
Department Of Applied Electronics Graduate School Of Science And Technology
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ISHIWARA Hiroshi
Department of Electronics and Systems, Faculty of Coordinated Sciences, Tokyo Institute of Technology
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