Effect of Microstructure and Crystalline Orientation of Pt Single- or Pt/Ru Bilayer-Electrodes on the Work Function and Leakage Current of SrTiO3 Capacitors

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概要

• 論文の詳細を見る

• SrTiO3 dielectric thin film capacitors using Pt single layer or Pt/Ru bilayer metal electrodes were prepared on various substrates by pulsed laser ablation. The work function and the surface roughness were evaluated for Pt metal electrodes. In addition, leakage currents and Schottky barrier heights were also characterized for the capacitors. The leakage current was suppressed and the Schottky barrier height enhanced by decreasing the surface roughness and increasing the work function of the metal electrodes. The work function of metal electrodes measured by photo-electron spectroscopy in air was increased by approximately 0.16 eV by decreasing surface roughness. Similar to the work function, the Schottky barrier heights were increased by approximately 0.20 eV. These results allow us to control leakage current behavior of thin film capacitors by tuning of the electrode microstructures.

• 2008-08-25

著者

• Takahashi Kohshin

  Division Of Innovative Technology And Science Graduate School Of Natural Science And Technology Kana

• Yonezawa Yasuto

  Industrial Research Institute Of Ishikawa

• Yamada Satoru

  Ishikawa National College of Technology, Tsubata, Ishikawa 920-0392, Japan

• Yonezawa Yasuto

  Industrial Research Institute of Ishikawa, Tomizu, Kanazawa 920-0223, Japan

• Yamada Satoru

  Ishikawa National College of Technology, Tsubata, Ishikawa 929-0392, Japan

• Kim Taeyong

  Division of Electrical and Computer Science, Graduate School of Natural Science and Technology, Kanazawa University, Kakuma-machi, Kanazawa 920-1192, Japan

• Kawae Takeshi

  Division of Electrical and Computer Science, Graduate School of Natural Science and Technology, Kanazawa University, Kakuma-machi, Kanazawa 920-1192, Japan

• Ikegami Naofumi

  Division of Electrical and Computer Science, Graduate School of Natural Science and Technology, Kanazawa University, Kakuma-machi, Kanazawa 920-1192, Japan

• Morimoto Akiharu

  Division of Electrical and Computer Science, Graduate School of Natural Science and Technology, Kanazawa University, Kakuma-machi, Kanazawa 920-1192, Japan

• Kumeda Minoru

  Division of Electrical and Computer Science, Graduate School of Natural Science and Technology, Kanazawa University, Kakuma-machi, Kanazawa 920-1192, Japan

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