In-Situ Ellipsometric Observations of Thickness Change in the Layers of Ag/a-As_2S_3 Film System with Progression of Photodoping
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2000-02-15
著者
-
Ogawa T
Faculty Of Engineering Takushoku University
-
Ogawa Tohru
Technology Strategy Development Sony Co. Core Technology & Network Company
-
WAKAKI Moriaki
Department of Optical and Imaging Science and Technology, School of Engineering, Tokai University
-
Ogawa Tetsuya
Institute For Chemical Research Kyoto University
-
MURAKAMI Yoshihisa
Tsukuba College of Technology
-
OGAWA Tsutomu
Institute for Applied Optics
-
KAWABATA Shuichi
Faculty of Engineering, Tokyo Institute of Polytechnics
-
Wakaki Moriaki
Department O Electro-photo-optics Engineering Tokai University
-
Kawabata Shuichi
Faculty Of Engineering Tokyo Institute Of Polytechnics
関連論文
- 平成21年度インターンシップ実施報告--一貫したキャリア教育を目指して
- Pb(Mg1/3Nb2/3)03-PbTiO3単結晶での巨大横効果圧電性の組成依存
- Application of Zirconium Silicon Oxide Films to an Attenuated Phase-Shifting Mask in ArF Lithography
- Inhomogeneous substitution of polyhalogenated copperphthalocyanine studied by high-resolution imaging and electron crystallography
- 矩形自然循環ループにおける流れの不安定性 : 不安定領域に対する傾斜角度と冷却水温の影響
- Measurement of Temperature Rise of Quartz Plate during Synchrotron Radiation Irradiation Using Infrared Camera(Instrumentation, Measurement, and Fabrication Technology)
- Stabilization of ZrSi_xO_y Films by Irradiation with an ArF Excimer Laser
- Fabrication of 0.1 μm Patterns Using an Alternating Phase Shift Mask in ArF Excimer Laser Lithography
- Fabrication of 0.13-μm Device Patterns by Argon Fluoride Excimer Laser Lithography with Practical Resolution Enhancement Techniques
- High-Resolution Electron Microscopy of Lamellar Crystals of Syndiotactic Polypropylene
- クラスタービーム法によるGeナノ構造薄膜のラマン分光評価
- Hollow Density Profile on Electron Cyclotron Resonance Heating JFT-2M Plasma
- Electron diffraction analysis of polymorph structures in ultra thin film of vanadyl phthalocyanine on KBr(001)
- Wet-silylation Process for X-ray and EUV Lithographies
- Positive Charge Generation at a SiO_2/Si Interface due to Bombardment with Metastable Atoms
- Thermal and Ion-Induced Reactions on a Chlorine-Adsorbed GaAs (100) Surface Studied by Metastable-Atom De-excitation Electron Spectroscopy
- Negative Tone Dry Development of Si-Containing Resists by Laser Ablation
- X-Ray Lithography with a Wet-Silylated and Dry-Developed Resist
- Prevention of Resist Pattern Collapse by Flood Exposure during Rinse Process
- Simulation of Long-Range Contrast Modulation in Scanning Tunneling Microscope Image of Perylene-3,4,9,10-Tetraearboxylic-Dianhydride Monolayer on Graphite
- Modeling of In-Plane Distortion of Extreme Ultraviolet Lithography Mask in Flat State
- Thermal In-Plane Distortion Model of Mask for Extreme Ultraviolet Lithography during Periodic Scanning Exposure
- Approach to Patterning of Extreme Ultraviolet Lithography Masks using Ru Buffer Layer : Surfaces, Interfaces, and Films
- Thermal Behavior along Depth of Extreme Ultraviolet Lithography Mask during Dry Etching : Surfaces, Interfaces, and Films
- Temperature Rise of Extreme Ultraviolet Lithography Mask Substrate during Dry Etching Process : Semiconductors
- Estimation of Extreme Ultraviolet Power and Throughput for Extreme Ultraviolet Lithography
- Theoretical Analysis of Placement Error due to Absorber Pattern on Extreme Ultraviolet Lithography Mask
- Transmission Electron Microscopy Observation and Simulation Analysis of Defect-Smoothing Effect of Molybdenum/Silicon Multilayer Coating for Extreme Ultraviolet Lithography Masks
- 圧電単結晶Pb[(Zn1/3Nb2/3)0.91Ti0.09]O3の誘電・圧電・弾性定数とその温度特性
- Poling Field Dependence of Ferroelectric Properties in Barium Titanate Ceramics
- Passivation of Bulk and Surface Defects in GaAs Grown on Si Substrate by Radio Frequency Phosphine/Hydrogen Plasma Exposure : Semiconductors
- Simulation of Multilayer Defects in Extreme Ultraviolet Masks
- 教育関連報告 今の若者は大学に何を求めているか?--問題発見と解決能力向上のツール(第3報)
- Poling Field Dependence of Crystal Orientation and Ferroelectric Properties in Lead Titanate Ceramics
- In-Situ Ellipsometric Observations of Thickness Change in the Layers of Ag/a-As_2S_3 Film System with Progression of Photodoping
- Neural Network Estimation of Elastic Moduli of Composites by Impact Sound
- A Study on Analysis of Impact Sound Waveform by Answer-in-Weights Neural Network
- Photon-Stimulated Ion Desorption Measurement of Organosilicon Resist Reactions in Extreme Ultraviolet Lithography
- Observation of the Initial Stage of Ion Assisted Deposition Films Using a Rotating-Analyzer Ellipsometer
- 回転移相子型偏光解析装置の測定精度に関する研究
- Four-detector photopolarimeter(FDP)の試作とその応用
- 金蒸着膜の成膜過程のエリプソメトリーによる観察
- Four Detector Polarimeter (FDP) の試作
- Photoluminescence Studies of Hydrogen-Passivated Al_Ga_As Grown on Si Substrate by Metalorganic Chemical Vapor Deposition
- GaAsを用いたサブミリ波天文学用光伝導検出器の開発 : GaAsの超高純度液相エピタキシャル成長
- Volume Expansion and Ag Doping Amounts in the Photodoping Process in Amorphous As_2S_3
- In-Situ Observation of Photodoping Process by Infrared Attenuated Total Reflection Method
- 電子冷却用n型Bi_2(SeTe)_3合金の遠赤外評価
- Approach to Next-Generation Optical Lithography
- Photoacoustic and Luminescence Spectra of CdS Fine Particles
- Non-Radiative Recombination Processes and Related Phenomena in Ge Doped As_2Se_3 Glasses
- Vibrational Spectra and Effective Charges in Some Spinels : CHALCOGENIDE SPINELS : OPTICAL, ELECTRICAL AND MAGNETIC PROPERTIES
- Infrared Reflectivity and Crystal Strusture of InS
- Estimation of Non-Radiative Transition Rate in Tetracene-Doped Anthracene by Photoacoustic Spectroscopy : Chemistry (incl. physical process)
- Far-Infrared Reflectance Spectra of Al_xGa_As/GaAs Superlattices for Various Al Mole Fractions
- Far-Infrared Reflectance Spectra of Heavily Doped p-GaAs for Various Hole Concentrations
- Raman Scattering Determination of Free Carrier Concentration and Surface Depletion Layer in (100) p-GaAs Grown by Molecular-Beam Epitaxy
- コヒーレント後方散乱における経路長の測定
- Research of Fundamental Factors for Weak Localization of Light
- 偏光解析法による蒸着薄膜の応力分布測定
- PZTセラミックスのバイポーラパルスによる分極処理
- 物理教育のためのホログラフィック多重記録実験
- Study on Nonlinear Photocurrent in Photoconductive Switch Using Femtosecond Pulse Laser
- Optical Characteristics of Al_2O_3 Ceramics with Highly Doped Cr
- 固体レーザー用焼結体ルビーの光学特性
- Characterization of Crystal Quality of Bi_GeO_ Films Deposited by Using RF Magnetron Sputtering
- 等温気相成長法によるHg_Cd_xTe層の作製及び光学的評価
- Optical Characterization of Hg_Cd_xTe Layers Grown by Isothermal Vapour Epitaxy
- CO_2レーザーアニールによるZnO薄膜光導波路の伝搬損失低減
- エキシマレーザー・ドライ・エッチング法を用いたZnO三次元光導波路の試作
- 画像記録のためのBi_GeO_膜の構造評価
- ITO(Indium Tin Oxide) 単結晶成長および電気・光学的性質の研究
- Crystal Structure and Lattice Absorption of Partially-Inverse Spinel Compound MgIn_2S_4
- Optical and Electrical Properties of Inverse Spinel Compound MgIn_2S_4 : CHALCOGENIDE SPINELS : OPTICAL, ELECTRICAL AND MAGNETIC PROPERTIES
- 炭酸ガスレーザーによる光造形の基礎研究
- SNOMによるレーザー媒質Cr:Al_2O_3セラミックス中の光学活性Crの評価
- Peltier 冷却用材料n-BiSb, p-(BiSb)_2Te_3およびn-Bi_2(SeTe)_3の光学評価
- 赤外線検出器の最近の展望 : MCT(HgCdTe)検出器の進展
- フェムト秒(fs)レーザー光伝導スイッチにより発生した電気信号の伝搬の検討
- 光導電スイッチによるフェムト秒光パルスの自己相関計測
- 赤外線透過材料評価用赤外干渉計の基本性能評価
- マルチチャンネルフーリエ変換分光器を使用したラマン散乱スペクトル測定の応用研究
- 屈折率分布レンズの製作法に関する基礎研究
- レーザーあざ治療時に母斑より発生する音響衝撃波の基礎研究
- In-Situ Observation of Photodoping Process in a Chalcogenide Glass As_2S_3 by Ellipsometry
- Evaluation of Optically Active Cr Ion in Cr : Al_2O_3 Ceramics by SNOM
- Polarization Properties of a Laser Output from a CO_2 Laser with Special Cavity Mirrors
- 特殊共振器を用いたC0_2レーザーの基本特性の評価
- Propagation Loss Mechanism in Optical Waveguides of ZnO Thin Film and Fabrication of 3-D Optical Waveguides
- Optical Characteristics of Al_2O_3 Ceramics Doped with Cr at High Concentrations Prepared by Extrusion Molding Process
- Far-Infrared Reflectivity Spectra of Non-Doped and Mg-Doped In_2O_3 Single Crystals
- Ti:Al_2O_3セラミックスレーザー媒質の基礎研究
- Infrared Reflectivity Spectrum and Lattice Vibration of Spinel-Type Compound HgIn_2S_4
- Synthesis and Supramolecular Association of NCN-Pincer Pd-Complex-bound Norvaline Derivatives toward Fabrication of Controlled Metal Array
- Poling Field Dependence of Ferroelectric Properties and Crystal Orientation in Rhombohedral Lead Zirconate Titanate Ceramics
- Crystal Orientation of Tetragonal Lead Zirconate Titanate Ceramic Surface and Its Aging Behavior
- Poling Field Dependence of Ferroelectric Domains in Tetragonal Lead Zirconate Titanate Ceramics
- Thin-Film Phase of Pentacene Film Formed on KCl by Vacuum Deposition
- Temperature Dependence of Photoacoustic and Photoluminescence Signals for CdSxSe1-x Microcrystals
- Effect of Size Confinement on the Electronic States of CdS Cluster in a Germanium Oxide Matrix