Characterization of Crystal Quality of Bi_<12>GeO_<20> Films Deposited by Using RF Magnetron Sputtering
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概要
- 論文の詳細を見る
The photorefractive single crystal bulk samples have been used for image recording. Films of Bi_<12>GeO_<20> which belongs to a bismuth sillenite compound were deposited by using RF magnetron sputtering. Thin films have merits in device integration and mass production. The process condition to obtain a good crystalline film was studied. The film with crystalline phase only was obtained at the substrate temperatures above 200℃.
- 東海大学の論文
著者
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SHIBUYA Takehisa
Department of Electro-Photo Optics, School of Engineering, Tokai University
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Wakaki Moriaki
Department Of Optical Imaging And Science & Technology Tokai University
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Wakaki Moriaki
Department O Electro-photo-optics Engineering Tokai University
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Yokota Hideshi
Department Of Electro Photo Optics
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Shibuya Takehisa
Department Of Optical Imaging And Science & Technology Tokai University
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KATSUMA Hidetoshi
School of Science, Tama Art Univ.
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MUROTANI Hiroshi
Course of Electro-photo Optics
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ISSHIN Kenji
Course of Electro Photo Optics
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KATSUMA Hidetoshi
Department of Physics, Tama Art University
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ISSHIN Kenji
Department Electro-Photo-Optics, Tokai University
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Isshin Kenji
Department Electro-photo-optics Tokai University
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Murotani Hiroshi
Department Electro-photo-optics Tokai University
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Murotani Hiroshi
Course Of Electro Photo Optics
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Katsuma Hidetoshi
School Of Science Tama Art Univ.
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Shibuya Takehisa
Department Of Applied Science Optics And Photonics School Of Engineering Tokai University
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