Measurement of Temperature Rise of Quartz Plate during Synchrotron Radiation Irradiation Using Infrared Camera
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概要
- 論文の詳細を見る
The temperature rise of an attenuator under synchrotron radiation irradiation was measured with an infrared (IR) camera containing an InSb detection device. Since the measured value changes with the emissivity of the measured sample, in measurement by thermography, calibration is required. In order to determine the actual temperature rise, calibration of the IR camera was performed using a hot plate as a heat source under the same geometrical arrangement as the double quartz plates with a sapphire window. The calibrated temperature rise is three times higher than the temperature rise observed with the IR camera. The calibrated temperature rise is in agreement with temperature rise predicted by simulation. As a result, it is predicted that the temperature rise of the attenuator is 119°C at a beam current of 500 mA.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 2002-01-15
著者
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Chiba Akira
Aset (association Of Super-advanced Electronics Technologies) Euv Process Technology Research Labora
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Oizumi Hiroaki
Aset Euvl Laboratory
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YAMANASHI Hiromasa
ASET EUVL Laboratory
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HOKO Hiromasa
ASET EUVL Laboratory
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OGAWA Tarou
ASET EUVL Laboratory
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OKAZAKI Shinji
ASET EUVL Laboratory
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Nishiyama Iwao
Aset (association Of Super-advanced Electronics Technologies) Euv Process Technology Research Labora
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Nishiyama Iwao
ASET EUVL Laboratory, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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Okazaki Shinji
ASET EUVL Laboratory, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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Oizumi Hiroaki
ASET EUVL Laboratory, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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Yamanashi Hiromasa
ASET (Association of Super-Advanced Electronics Technologies), EUV Process Technology Research Laboratory, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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