Oizumi H | Aset Euvl Lab. Kanagawa Jpn
スポンサーリンク
概要
関連著者
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Oizumi H
Hitachi Ltd. Tokyo Jpn
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Oizumi H
Aset Euvl Lab. Kanagawa Jpn
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Oizumi Hiroaki
Sortec Corporation
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OGAWA Taro
Central Research Laboratory, Hitachi Ltd.
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Ogawa Taro
Central Research Laboratory Hitachi Ltd.
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Yamashita Yohachi
Toshiba Materials & Devices Research Laboratories
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Yamashita Y
Central Research Laboratory Hamamatsu Photonics K.k.
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YAMASHITA Yoshio
SORTEC Corporation
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Murakami K
静岡大学電子工学研究所
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Yamashita Yohachi
Corporate R&d Center Toshiba Corporation
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Yamaguchi Yoh-ichi
Hoya Corporation
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Yamashita Yoshio
Sortec Corporation:(present Address) Oki Electric Industry Co. Ltd.
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Murakami Kouichi
Institute Of Material Science University Of Tsukuba
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Murakami K
Research Institute Of Electronics Shizuoka University
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Oizumi Hiroaki
Central Research Laboratory Hitachi Ltd.
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Soga Tetsuo
Department Of Electronics Faculty Of Engineering Nagoya University
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Atoda Nobufumi
Laboratory For Advanced Optical Technology National Institute Of Advanced Industrial Science And Tec
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Atoda N
Sortec Ibaraki Jpn
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Atoda Nobufumi
Sortec
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Nagata H
Sumitomo Osaka Cement Co. Ltd. Chiba Jpn
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Soga T
Nagoya Inst. Technol. Nagoya Jpn
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SOGA Takashi
Central Research Laboratory, Hitachi, Ltd.
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Soga Takashi
Central Research Laboratory Hitachi Limited
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Ohtani M
Obihiro Univ. Agriculture And Veterinary Medicine Obihiro Jpn
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Tanaka T
Department Of Electric And Electronic Engineering Toyohashi University Of Technology
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Ogawa Tohru
Technology Strategy Development Sony Co. Core Technology & Network Company
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MOCHIJI Kozo
Central Research Laboratory, Hitachi Ltd.
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Yamashita Y
Power Supply Materials And Devices Laboratory Corporate R&d Center Toshiba Corporation
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TANAKA Toshihiko
Central Research Laboratory, Hitachi, Ltd.
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Mochiji K
Joint Res. Center For Atom Technol. Angstrom Technol. Partnership(jrcat‐atp) Ibaraki Jpn
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Mochiji Kozo
Central Research Laboratory Hitachi Ltd.
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Tanaka Toshihiko
Central Research Laboratory, Hitachi Ltd.
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Takeda E
Department Of Clinical Nutrition University Of Tokushima Graduate School
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Takeda E
Hitachi Ltd. Tokyo Jpn
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Takeda E
Univ. Of Tokushima Graduate School Tokushima Jpn
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Takeda Eiji
Central Research Laboratory Hitachi Ltd.
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Takeda Eiji
Central Research Laboratory Hitachi Lid.
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Watanabe Teruo
Futaba Corporation
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Watanabe T
Components Development Group Sony Corporation
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Watanabe T
Ritsumeikan Univ. Shiga Jpn
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Watanabe Tetsu
Components Development Group Sony Corporation
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Watanabe T
Tokyo Inst. Technol. Kanagawa Jpn
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Watanabe T
Reserch And Development Division Toto Ltd.
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Yoshida Yoichi
The Institute Of Scientific And Industrial Research Osaka University
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Yamada Yasusada
Advanced Research Institute Waseda University:advanced Science Research Center Japan Atomic Energy R
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MURAKAMI Katsuhiko
Main Research Laboratory, Nikon Corporation
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OHTANI Masayuki
Tsukuba Research Laboratory, Nikon Corporation
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NAGATA Hiroshi
Main Research Laboratory, Nikon Corporation
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Watanabe T
Tokyo Univ. Agriculture And Technol. Tokyo Jpn
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Watanabe T
Tohoku Univ. Sendai Jpn
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Watanabe Toshihide
Atr Adaptive Communications Research Laboratories:(present Address)science And Technical Research La
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Nagata Hiroshi
Main Research Laboratory Nikon Corporation
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Yamashita Yasuharu
Synthetic Crystal Research Laboratory School Of Engineering Nagoya University
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Takeda Eiji
Central Research Laboratory
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Ohtani Masayuki
Tsukuba Research Laboratory Nikon Corporation
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Takeda Eiji
徳島大学 病態栄養
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MATSUMOTO Mutsuyoshi
National Institute of Advanced Industrial Science and Technology
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Fujikawa Takayuki
Department Of Organic And Polymeric Materials Tokyo Institute Of Technology:(present Address) Displa
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TAGUCHI Takao
SORTEC Corporation
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Oizumi Hiroaki
Faculty Of Engineering Yokohama National University
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NAKAI Shun-ichi
Faculty of Engineering, Utsunomiya University
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Ohashi Masayoshi
Kddi R&d Laboratories
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TACHIBANA Hiroaki
National Institute of Materials and Chemical Research
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Yamaguchi A
Hitachi Ltd. Tokyo Jpn
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Yamaguchi Atsumi
Ulsi Development Center Mitsubishi Electric Corporation
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Ohashi M
Institute For Materials Research Tohoku University
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Ohashi M
Tohoku Univ. Sendai
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Ohashi M
Yamagata Univ. Yamagata
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FUJIKAWA Takashi
Faculty of Engineering,Yokohama National University
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Maezawa H
Photon Factory National Laboratory For High Energy Physics
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Mori S
Department Of Electric And Electrical Engineering School Of Science And Engineering Saga University
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MATSUMOTO Mitsuhiro
Nara Prefectural Institute of Public Health
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MAEJIMA Yukihiko
SORTEC Corporation
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WATANABE Takeo
SORTEC Corporation
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Iijima S
Fundamental Research Laboratories Nec Corporation
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Iijima Sumio
Fundamental Research Laboratories Nec Corporation
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中井 俊一
宇都宮大学工学部
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IIJIMA Shinpei
Central Research Laboratory, Hitachi Ltd
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NAKAI Sadao
Kochi National College of Technology
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TAGUCHI Takao
ASET Super-fine SR Lithography Laboratory
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Iijima Shinpei
Central Research Laboratory Hitachi Ltd
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OHASHI Masanao
Faculty of Engineering,Utsunomiya University
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SAITOH Masayoshi
Central Research Laboratory, Hitachi, Ltd.
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YAMAGUCHI Atsuko
Central Research Laboratory, Hitachi, Ltd.
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MORIGAMI Mitsuaki
SORTEC Corporation
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Yamaguchi Atsuko
Central Research Laboratory Hitachi Ltd.
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Yamaguchi Atsuko
Association Of Super-advanced Electronics Technologies:(present Address)hitachi Central Laboratory
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Matsumoto Michio
Faculty Of Engineering Yamanashi University
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Ohashi Masanao
Faculty Of Engineering Utsunomiya University
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Yamaguchi A
Sumitomo Electric Ind. Ltd. Yokohama Jpn
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Matsumoto M
National Inst. Materials And Chemical Res. Tsukuba Jpn
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Saitoh Masayoshi
Central Research Laboratory Hitachi Ltd.
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中井 俊一
Faculty Of Engineering Utstunomiya University
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Taguchi T
Department Of Electrical And Electronic Engineering Yamaguchi University
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Oshino Tetsuya
R&d Headquarters Nikon Corporation
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Oshino Tetsuya
Precision Equipment Company Nikon Corporation
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Nakai Shun-ichi
Faculty Of Engineering Utsunomiya University
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Matsumoto M
Nara Prefectural Institute Of Public Health
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Maejima Y
Silicon Systems Research Laboratories Nec Corporation
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Matsuzawa N
Assoc. Super‐advanced Electronics Technol. Kanagawa Pref. Jpn
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Fujikawa Takashi
Faculty Of Engineering Yokohama National University
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Morigami M
Sortec Corp. Ibaraki Jpn
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Fujikawa Takashi
Faculty Of Agriculture Shizuoka University
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Nakai Sadao
Institute Of Laser Engineering Faculty Of Engineering Osaka University
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Tachibana Hiroaki
National Institute of Advanced Industrial Science and Technology (AIST)
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Matsumoto Mutsuyoshi
National Chemical Laboratory for Industry
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Shimizu S
Nikon Corp. Tokyo Jpn
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Shimizu Sumito
Main Research Laboratory Nikon Corporation
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MATSUZAWA Nobuyuki
Atsugi Research Center, Association of Super-Advanced Electronics Technologies (ASET), c
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OIZUMI Hiroaki
o NTT Atsugi R&D Center
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MORI Shigeyasu
Atsugi Research Center, Association of Super-Advanced Electronics Technologies (ASET), c
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IRIE Shigeo
o NTT Atsugi R&D Center
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SHIRAYONE Shigeru
Atsugi Research Center, Association of Super-Advanced Electronics Technologies (ASET), c
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YANO Ei
o NTT Atsugi R&D Center
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OKAZAKI Shinji
Atsugi Research Center, Association of Super-Advanced Electronics Technologies (ASET), c
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ISHITANI Akihiko
o NTT Atsugi R&D Center
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DIXON David
Atsugi Research Center, Association of Super-Advanced Electronics Technologies (ASET), c
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MAEZAWA Hideki
Photon Factory, National Laboratory for High Energy Physics
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YAMANASHI Hiromasa
ASET EUVL Laboratory
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Maezawa Hideki
Photon Factory National Laboratory For High Energy Physics
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MURAKAMI Katsuhiko
Tsukuba Research Laboratory, Nikon Corporation
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NAGATA Hiroshi
Tsukuba Research Laboratory, Nikon Corporation
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OHTANI Masayuki
Main Research Laboratory, Nikon, Corporation
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OSHINO Tetsuya
Main Research Laboratory, Nikon, Corporation
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MURAKAMI Katsuhiko
Nikon Corporation
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OHTANI Masayuki
Nikon Corporation
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NAGATA Hiroshi
Nikon Corporation
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Tanaka T
Corporate Research And Development Laboratories Pioneer Corporation
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MITSUISHI Tsutomu
Faculty of Engineering,Utsunomiya University
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MURAKAMI Katsuhiko
R&D Headquarters, Nikon Corporation
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OSHINO Tetsuya
R&D Headquarters, Nikon Corporation
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KINOSHITA Hiroo
Laboratory of Advanced Science and Technology for Industry, Himeji Institute of Technology
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WATANABE Takeo
Laboratory of Advanced Science and Technology for Industry, Himeji Institute of Technology
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NIIBE Masato
Laboratory of Advanced Science and Technology for Industry, Himeji Institute of Technology
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ITO Masaaki
Central Research Laboratory, Hitachi, Ltd.
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YAMANASHI Hiromasa
Central Research Laboratory, Hitachi, Ltd.
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MAEZAWA Hideki
National Laboratory for High Energy Physics
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YAMANAKA Ryoko
Central Research Laboratory, Hitachi Limited
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UCHINO Shou-ichi
Central Research Laboratory, Hitachi Limited
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SCHECKLER Edward
Central Research Laboratory, Hitachi Ltd.
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SAITHO Masayoshi
Central Research Laboratory, Hitachi, Ltd.
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E.W シェクラー
日立製作所中央研究所
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Nagata H
Sci. Univ. Tokyo Chiba‐ken Jpn
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YANO Ei
Fujitsu Laboratories Ltd.
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Ito M
Aset Euv Laboratory C-o Ntt Atsugi Research Center
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Dixon David
Atsugi Research Center Association Of Super-advanced Electronics Technologies (aset) C
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Irie S
Semiconductor Leading Edge Technologies Ibaraki Jpn
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Irie Shigeo
Semiconductor Leading Edge Technologies Inc. (selete)
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Niibe Masato
Laboratory Of Advanced Science And Technology For Industry Himeji Institute Of Technology
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Yamanaka Ryoko
Central Research Laboratory Hitachi Limited
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Okazaki S
Assoc. Super‐advanced Electronics Technol. Kanagawa Pref. Jpn
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Kinoshita Hiroo
Laboratory Of Advanced Science And Technology For Industry Himeji Institute Of Technology
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Tanaka T
Ceramic Operation Ibiden Co. Ltd.
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E.w シェクラー
モノリステクノロジーズ
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Ishitani A
O Ntt Atsugi R&d Center:(permanant Address)semiconductor Company Matsushita Electronics Corporat
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Mitsuishi T
Utsunomiya Univ. Utsunomiya
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Mitsuishi Tsutomu
Faculty Of Engineering Utsunomiya University
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Oshino Tetsuya
Research Laboratory Nikon Corporation
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Yamanashi H
Aset Euvl Laboratory
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Yamanashi Hiromasa
Central Research Laboratory Hitachi Ltd.
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Shirayone S
Assoc. Super‐advanced Electronics Technol. Kanagawa Pref. Jpn
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Watanabe Takeo
Laboratory Of Advanced Science And Technology For Industry University Of Hyogo
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Ito Masaaki
Central Laboratory Rengo Co. Ltd.
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Uchino Shou-ichi
Central Research Laboratory Hitachi Limited
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MURAKAMI Katsuhiko
Nikon Corp.
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Ishitani Akihiko
o NTT Atsugi R&D Center:(Permanant address)Semiconductor Company, Matsushita Electronics Corporation.
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Uchino Shou-ichi
Central Research Lab., Hitachi Ltd.
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Tanaka Tooru
Faculty of Science and Technology, Meijo University
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Yamanashi Hiromasa
Central Research Lab., Hitachi, Ltd., Kokubunji, Tokyo 185-8601, Japan
著作論文
- Theoretical Calculation of Photoabsorption of Various Polymers in an Extreme Ultraviolet Region
- Theoretical Estimation of Absorption Coefficients of Various Polymers at 13 nm
- Electroplated Reflection Masks for Soft X-Ray Projection Lithography
- Resist Performance in 5 nm Soft X-Ray Projection Lithography
- Reduction Imaging at 4.5 nm with Schwarzschild Optics
- Fabrication of 0.1μm Line-and-Space Patterns using Soft X-Ray Reduction Lithography
- Sub-0.1 μm Resist Patterning in Soft X-Ray (13 nm) Projection Lithography
- Ring-Field Extreme Ultraviolet Exposure System Using Aspherical Mirrors
- Influence of Oxygen upon Radiation Durability of SiN X-Ray Mask Membranes : Lithography Technology
- Influence of Oxygen upon Radiation Durability of SiN X-ray Mask Membranes
- F-K XANES Studies of Alkali Fluorides
- F-K XANES Studies of Alkaline-Earth Fluorides
- Wet-silylation Process for X-ray and EUV Lithographies
- X-Ray Mask Technology Utilizing an Optical Stepper
- Negative Tone Dry Development of Si-Containing Resists by Laser Ablation
- X-Ray Lithography with a Wet-Silylated and Dry-Developed Resist
- Prevention of Resist Pattern Collapse by Flood Exposure during Rinse Process
- New Dry Surface-Imaging Process for X-Ray Lithography
- Simulation of AZ-PN100 Resist Pattern Fluctuation in X-Ray Lithography, Including Synchrotron Beam Polarization
- Freeze-Drying Process to Avoid Resist Pattern Collapse
- X-ray Mask Technology utilizing an Optical Stepper : X-Ray Lithography