Kinoshita Hiroo | Laboratory Of Advanced Science And Technology For Industry Himeji Institute Of Technology
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関連著者
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Kinoshita Hiroo
Laboratory Of Advanced Science And Technology For Industry Himeji Institute Of Technology
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Watanabe Takeo
Laboratory Of Advanced Science And Technology For Industry University Of Hyogo
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KINOSHITA Hiroo
Laboratory of Advanced Science and Technology for Industry, Himeji Institute of Technology
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WATANABE Takeo
Laboratory of Advanced Science and Technology for Industry, Himeji Institute of Technology
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HAMAMOTO Kazuhiro
Laboratory of Advanced Science and Technology for Industry, University of Hyogo
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Komano H
Tokyo Ohka Kogyo Co. Ltd. Kanagawa Jpn
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Watanabe T
Laboratory Of Advanced Science And Technology For Industry University Of Hyogo
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Kinoshita H
Laboratory Of Advanced Science And Technology For Industry University Of Hyogo
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Fukushima Yasuyuki
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Koto, Kamigori, Akou-gun, Hyogo 678-1205, Japan
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Lee Seung
Laboratory Of Advanced Science And Technology For Industry University Of Hyogo
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Tanaka Yuzuru
Laboratory Of Advanced Science And Technology For Industry University Of Hyogo
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Watanabe Takeo
Univ. Hyogo Hyogo Jpn
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Sakaya Noriyuki
Hoya Corporation Electro-optics Company R&d Center
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Ohnishi Ryuji
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Kamigori, Hyogo 678-1205, Japan
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Shiotani Hideaki
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Koto, Kamigori, Akou-gun, Hyogo 678-1205, Japan
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Niibe Masahito
Laboratory of Advanced Science &Technology for Industry, Himeji Institute of Technology
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Watanabe Takayuki
Department of Innovative and Engineered Materials, Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology
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Ohnishi Ryuji
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Koto, Kamigori, Akou-gun, Hyogo 678-1205, Japan
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Watanabe Toshihide
Atr Adaptive Communications Research Laboratories:(present Address)nhk Science And Technical Researc
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Watanabe T
Department Of Innovative And Engineered Materials Interdisciplinary Graduate School Of Science And E
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SHOKI Tsutomu
HOYA Corporation
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HADA Hideo
Advanced Material Development Division 1, Tokyo Ohka Kogyo Co., Ltd.
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KOMANO Hiroshi
Advanced Material Development Division 1, Tokyo Ohka Kogyo Co., Ltd.
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Niibe M
Himeji Inst. Technol. Hyogo Jpn
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Niibe Masahito
Himeji Institute Of Technology Laboratory Of Advanced Science And Technology For Industry
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Niibe Masahito
Laboratory Of Advanced Science And Technology For Industry Himeji Institute Of Technology
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Yusa Shinichi
Graduate School of Engineering, University of Hyogo, Himeji, Hyogo 671-2201, Japan
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Suzuki Shota
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Kamigori, Hyogo 678-1205, Japan
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Hosoya Morio
R&D Center, HOYA Corporation, 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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Sakaya Noriyuki
R&D Center, HOYA Corporation, 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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Kinoshita Hiroo
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Kamigori, Hyogo 678-1205, Japan
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Suzuki Shota
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Koto, Kamigori, Akou-gun, Hyogo 678-1205, Japan
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HARADA Tetsuo
Laboratory of Advanced Science and Technology for Industry, University of Hyogo
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Hayakawa Masamichi
Toyo Gosei Kogyo Co. Ltd. Chiba Jpn
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HADA Hideo
New Technology Development Section, Tokyo Ohka Kogyo Co., Ltd.
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HOSOKAWA Nobuyuki
Nitto Thin Film Laboratories Co., Ltd.
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HOSOYA Morio
HOYA Corporation Electronics Development Center
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Niibe Masato
Laboratory Of Advanced Science And Technology For Industry Himeji Institute Of Technology
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Shoki T
Hoya Corp. Tokyo Jpn
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Shoki Tsutomu
Hoya Corporation Ngl Development Center
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SHOKI Tsutomu
R&D center, HOYA Corporation
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Mashima Kiyoto
Optical Designing Headquarters R&d Dept. Nikon Corporation
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Shiotani Hideaki
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Kamigori, Hyogo 678-1205, Japan
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Endo Yusuke
Toyo Gosei Kogyo Co., Ltd., Inba, Chiba 270-1609, Japan
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Yamanaka Tomotaka
Toyo Gosei Kogyo Co., Ltd., Inba, Chiba 270-1609, Japan
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Kamaji Yoshito
Laboratory of Science and Technology for Industry, University of Hyogo, 3-1-2 Koto, Kamigori, Hyogo 678-1205, Japan
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Takase Kei
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Koto, Kamigori, Hyogo 678-1205, Japan
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Harada Tetsuo
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Kamigoori, Hyogo 678-1205, Japan
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Nozawa Osamu
R&D Center, HOYA Corporation, 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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Shiota Yuki
R&D Center, HOYA Corporation, 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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Shimojima Shoji
R&D Center, HOYA Corporation, 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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Yoshizumi Takahiro
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Kamigori, Hyogo 678-1205, Japan
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Hosoya Morio
HOYA Corporation Electro-Optics Company R&D Center, Akishima, Tokyo 196-8510, Japan
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Tanaka Kazuumi
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 1-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan
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Yoshizumi Takahiro
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Kouto, Kamigori-cho, Ako-gun, Hyogo 678-1205, Japan
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Hosokawa Nobuyuki
Nitto Thin Film Laboratories Co., Ltd, 147-1 Myodenji, Rokugohigashine, Rokugo-machi, Senboku-gun, Akita 019-1403, Japan
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Kamaji Yoshito
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Koto, Kamigori, Hyogo 678-1205, Japan
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Oizumi H
Hitachi Ltd. Tokyo Jpn
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Oizumi Hiroaki
Central Research Laboratory Hitachi Ltd.
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Oizumi H
Aset Euvl Lab. Kanagawa Jpn
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Oizumi Hiroaki
Sortec Corporation
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Sugie Yosohiro
Graduate School Of Engineering Department Of Materials Science And Chemistry University Of Hyogo
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Sugie Yosohiro
Graduate School Of Engineering Himeji Institute Of Technology
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Watanabe Teruo
Futaba Corporation
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Murakami K
静岡大学電子工学研究所
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Watanabe T
Components Development Group Sony Corporation
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Watanabe T
Ritsumeikan Univ. Shiga Jpn
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Watanabe Tetsu
Components Development Group Sony Corporation
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Watanabe T
Tokyo Inst. Technol. Kanagawa Jpn
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Watanabe T
Reserch And Development Division Toto Ltd.
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HIRAYAMA Taku
New Technology Development Section, Tokyo Ohka Kogyo Co., Ltd.
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SHIONO Daiju
New Technology Development Section, Tokyo Ohka Kogyo Co., Ltd.
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ONODERA Junichi
New Technology Development Section, Tokyo Ohka Kogyo Co., Ltd.
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YAMANASHI Hiromasa
ASET EUVL Laboratory
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Watanabe T
Tokyo Univ. Agriculture And Technol. Tokyo Jpn
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Watanabe T
Tohoku Univ. Sendai Jpn
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Watanabe Toshihide
Atr Adaptive Communications Research Laboratories:(present Address)science And Technical Research La
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YANAGIHARA Mihiro
Institute of Multidisciplinary Research for Advanced Materials, Tohoku University
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MURAKAMI Katsuhiko
R&D Headquarters, Nikon Corporation
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OSHINO Tetsuya
R&D Headquarters, Nikon Corporation
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NIIBE Masato
Laboratory of Advanced Science and Technology for Industry, Himeji Institute of Technology
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ITO Masaaki
Central Research Laboratory, Hitachi, Ltd.
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YAMANASHI Hiromasa
Central Research Laboratory, Hitachi, Ltd.
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Matsuo Yoshiaki
Graduate School Of Engineering Department Of Materials Science And Chemistry University Of Hyogo
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Matsuo Yoshiaki
Graduate School Of Engineering Himeji Institute Of Technology
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Sakaya Noriyuki
Hoya Corporation Ngl Development Center
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KAWASHIMA Hirotake
Laboratory of Advanced Science and Technology for Industry, University of Hyogo
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Murakami Kouichi
Institute Of Material Science University Of Tsukuba
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Ito M
Aset Euv Laboratory C-o Ntt Atsugi Research Center
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Harada Tetsuo
Laboratory Of Environmental Physiology Faculty Of Education Kochi University
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Niibe Masato
Laboratory Of Advanced Science And Technology For Industry Himeji Institute Technology
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Oshino Tetsuya
R&d Headquarters Nikon Corporation
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Oshino Tetsuya
Precision Equipment Company Nikon Corporation
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Okazaki Shinji
Association Of Super-advanced Electonics Technologies
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HAMAMOTO Kazuhiro
Department of Materials Science and Engineering, Faculty of Engineering
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HOSOYA Morio
Electronics development Center; HOYA Corporation
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SHOKI Tsutomu
Electronics development Center; HOYA Corporation
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Kinoshita Hiroo
Laboratory Of Advanced Science And Technology For Industry Himeji Institute Technology
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Yanagihara Mihiro
Institute For Solid State Physics The University Of Tokyo:national Laboratory For High Energy Physic
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Nii H
Himeji Inst. Technol. Hyogo Jpn
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NII Hajime
Laboratory of Advanced Science &Technology for Industry, Himeji Institute of Technology
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TANAKA Takeshi
Laboratory of Advanced Science &Technology for Industry, Himeji Institute of Technology
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MASHIMA Kiyoto
Optical Designing Headquarters, R&D Dept., Nikon Corporation
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Murakami K
Research Institute Of Electronics Shizuoka University
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Itani Toshiro
Semiconductor Leading Edge Technol. Ibaraki Jpn
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NH Hajime
Graduate School of Engineering, Himeji institute of Technology
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MIYAGAWA Makoto
Graduate School of Engineering, Himeji institute of Technology
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Yamanashi H
Aset Euvl Laboratory
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Yamanashi Hiromasa
Central Research Laboratory Hitachi Ltd.
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Miyagawa Makoto
Graduate School Of Engineering Himeji Institute Of Technology
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Nh Hajime
Graduate School Of Engineering Himeji Institute Of Technology
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Oizumi Hiroaki
Semiconductor Leading Edge Technol. Inc. Ibaraki Jpn
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Ito Masaaki
Central Laboratory Rengo Co. Ltd.
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Tanaka Takeshi
Laboratory Of Advanced Science &technology For Industry Himeji Institute Of Technology
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Nii Hajime
Graduate School of Engineering, Himeji institute of Technology
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Fukushima Yasuyuki
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Kamigori, Ako, Hyogo 678-1205, Japan
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Suzuki Shouta
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Kamigori, Hyogo 678-1205, Japan
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Ogi Satoshi
Toyo Gosei Kogyo Co., Ltd., Inba, Chiba 270-1609, Japan
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Shiotani Hideaki
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Kamigori, Ako, Hyogo 678-1205, Japan
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Hosokawa Nobuyuki
Nitto Thin Film Laboratories Co., Ltd., 147-1 Myodenji, Rokugohigashine, Rokugo-machi, Senboku-gun, Akita 019-1403, Japan
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Oizumi Hiroaki
Semiconductor Leading Edge Technologies, Inc., Tsukuba, Ibaraki 305-8569, Japan
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Matsuda Naohiro
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Kamigoori, Hyogo 678-1205, Japan
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Wood James.
Osmic Inc., 1788 Northwood Drive, Troy, MI 48084, USA
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Takase Kei
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Kamigori, Hyogo 678-1205, Japan
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Harada Tetsuo
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Kamigori, Hyogo 678-1205, Japan
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Kinoshita Hiroo
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Kouto, Kamigori-cho, Ako-gun, Hyogo 678-1205, Japan
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Kinoshita Hiroo
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2, Kouto, Kamigoori-cho, Akou-gun, Hyogo 678-1205, Japan
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Kinoshita Hiroo
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 1-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan
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Kinoshita Hiroo
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan
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Kinoshita Hiroo
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Kamigori, Ako, Hyogo 678-1205, Japan
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Kinoshita Hiroo
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Kouto, Kamigori, Ako, Hyogo 678-1205, Japan
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Kinoshita Hiroo
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Kouto, Kamigoori-cho, Akou-gun, Hyogo 678-1205, Japan
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Uno Toshiyuki
R&D Center, Asahi Glass Co., Ltd., 1150 Hazawacho, Kanagawa-ku, Yokohama 221-8755, Japan
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Yamaguchi Yuya
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Kamigori, Hyogo 678-1205, Japan
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Kinoshita Hiroo
Laboratory of Advanced Science and Technology for Industry, Himeji Institute of Technology, 2167 Shosha, Himeji, Hyogo 671-2201, Japan
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Kinoshita Hiroo
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Koto, Kamigori, Hyogo 678-1205, Japan
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Kinoshita Hiroo
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Koto, Kamigori, Akou-gun, Hyogo 678-1205, Japan
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Kinoshita Hiroo
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Kamigoori, Hyogo 678-1205, Japan
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Lee Dong
Photomask Team, Memory Development Business Division, Semiconductor Business, Samsung Electronics Co., Ltd.,San #24 Nongseo-ri, Giheung-eup, Yongin, Gyeonggi-do, 449-711, Korea
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Naulleau Patrick
Laurence Berkeley National Laboratory, MS 2-400, 1 Cyclotron Rd., Berkeley, CA 94720, U.S.A.
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Sugiyama Takashi
Asahi Glass Co., Ltd., R&D Center, Yokohama 221-8755, Japan
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Uno Toshiyuki
Asahi Glass Co., Ltd., R&D Center, Yokohama 221-8755, Japan
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Kimpara Yachiyo
Avance Inc., 3-1-7-205 Meguro, Meguro-ku, Tokyo 153-0063, Japan
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Platonov Yuriy
Osmic Inc., 1788 Northwood Drive, Troy, MI 48084, USA
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Osugi Masafumi
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Koto, Kamigori, Hyogo 678-1205, Japan
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Tanaka Kazuumi
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Koto, Kamigori, Hyogo 678-1205, Japan
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Hamamoto Kazuhiro
HOYA Corporation, R&D Center Bldg., 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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Shiota Yuki
R&D Center, HOYA Corporation, 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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Shiota Yuki
R&D Center, HOYA Corp., 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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Hosoya Morio
R&D Center, HOYA Corporation, 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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Hosoya Morio
R&D Center, HOYA Corp., 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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Hosoya Morio
HOYA Corporation Electronics Development Center, 3-3-1 Musashino, Akishima-shi, Tokyo 196-8510, Japan
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Hosoya Morio
HOYA Corporation NGL Development Center, 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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Hamamoto Kazuo
R&D Center, HOYA Corp., 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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Nagarekawa Osamu
R&D Center, HOYA Corp., 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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Shiono Daiju
New Technology Development Section, Tokyo Ohka Kogyo Co., Ltd., 1590 Tabata, Samukawa-cho, Koza-gun, Kanagawa 253-0114, Japan
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Watanabe Takeo
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Kouto, Kamigori-cho, Ako-gun, Hyogo 678-1205, Japan
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Watanabe Takeo
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2, Kouto, Kamigoori-cho, Akou-gun, Hyogo 678-1205, Japan
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Watanabe Takeo
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 1-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan
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Watanabe Takeo
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan
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Watanabe Takeo
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Kamigori, Ako, Hyogo 678-1205, Japan
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Watanabe Takeo
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Kouto, Kamigori, Ako, Hyogo 678-1205, Japan
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Lee Seung
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2, Kouto, Kamigoori-cho, Akou-gun, Hyogo 678-1205, Japan
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Lee Seung
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Kouto, Kamigoori-cho, Akou-gun, Hyogo 678-1205, Japan
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Lee Seung
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Kouto, Kamigori-cho, Ako-gun, Hyogo 678-1205, Japan
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Hamamoto Kazuhiro
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Kouto, Kamigori-cho, Ako-gun, Hyogo 678-1205, Japan
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Hamamoto Kazuhiro
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2, Kouto, Kamigoori-cho, Akou-gun, Hyogo 678-1205, Japan
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Hamamoto Kazuhiro
R&D Center, HOYA Corporation, 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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Hamamoto Kazuhiro
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Kouto, Kamigoori-cho, Akou-gun, Hyogo 678-1205, Japan
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Hamamoto Kazuhiro
HOYA Corporation Electro-Optics Company R&D Center, Akishima, Tokyo 196-8510, Japan
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Hamamoto Kazuhiro
R&D Center, HOYA Corporation, 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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Shoki Tsutomu
R&D Center, HOYA Corp., 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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Shoki Tsutomu
HOYA Corporation Electronics Development Center, 3-3-1 Musashino, Akishima-shi, Tokyo 196-8510, Japan
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Shoki Tsutomu
HOYA Corporation NGL Development Center, 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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Tsubakino Harushige
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Kouto, Kamigori-cho, Ako-gun, Hyogo 678-1205, Japan
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Sakaya Noriyuki
R&D Center, HOYA Corporation, 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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Sakaya Noriyuki
R&D Center, HOYA Corp., 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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Sakaya Noriyuki
HOYA Corporation Electronics Development Center, 3-3-1 Musashino, Akishima-shi, Tokyo 196-8510, Japan
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Sakaya Noriyuki
HOYA Corporation NGL Development Center, 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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Sakaya Noriyuki
HOYA Corporation, R&D Center Bldg., 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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Nii Hajime
Laboratory of Advanced Science &Technology for Industry, Himeji Institute of Technology
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Hada Hideo
Advanced Material Development Division 1, Tokyo Ohka Kogyo Co., Ltd., 1590 Tabata, Samukawa-cho, Koza-gun, Kanagawa 253-0114, Japan
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Hada Hideo
New Technology Development Section, Tokyo Ohka Kogyo Co., Ltd., 1590 Tabata, Samukawa-cho, Koza-gun, Kanagawa 253-0114, Japan
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Hirayama Taku
New Technology Development Section, Tokyo Ohka Kogyo Co., Ltd., 1590 Tabata, Samukawa-cho, Koza-gun, Kanagawa 253-0114, Japan
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Suzuki Shota
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Kamigori, Ako, Hyogo 678-1205, Japan
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Shimojima Shoji
R&D Center, HOYA Corporation, 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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Shimojima Shoji
R&D Center, HOYA Corp., 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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Kawashima Hirotake
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Kouto, Kamigori-cho, Ako-gun, Hyogo 678-1205, Japan
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Nozawa Osamu
R&D Center, HOYA Corporation, 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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Nozawa Osamu
R&D Center, HOYA Corp., 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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Komano Hiroshi
Advanced Material Development Division 1, Tokyo Ohka Kogyo Co., Ltd., 1590 Tabata, Samukawa-cho, Koza-gun, Kanagawa 253-0114, Japan
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Uno Toshiyuki
R&D Center, Asahi Glass Co., Ltd., 1150 Hazawacho, Kanagawa-ku, Yokohama 221-8755, Japan
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Uno Toshiyuki
Asahi Glass Co., Ltd., R&D Center, Yokohama 221-8755, Japan
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Ohnishi Ryuji
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Kamigori, Ako, Hyogo 678-1205, Japan
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Kamaji Yoshito
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Kamigori, Hyogo 678-1205, Japan
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Tanaka Yuzuru
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Kouto, Kamigori-cho, Ako-gun, Hyogo 678-1205, Japan
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Hayakawa Masamichi
Toyo Gosei Kogyo Co., Ltd., Inba, Chiba 270-1609, Japan
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Itani Toshiro
Semiconductor Leading Edge Technologies, Inc., Tsukuba, Ibaraki 305-8569, Japan
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Onodera Junichi
New Technology Development Section, Tokyo Ohka Kogyo Co., Ltd., 1590 Tabata, Samukawa-cho, Koza-gun, Kanagawa 253-0114, Japan
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TOYODA Mitsunori
Institute of Multidisciplinary Research for Advanced Materials, Tohoku University
著作論文
- Ring-Field Extreme Ultraviolet Exposure System Using Aspherical Mirrors
- Novel Evaluation System for Extreme Ultraviolet Lithography Resist in NewSUBARU
- Contrast Measurement of Reflection Masks Fabricated from Cr and Ta Absorbers for Extreme Ultraviolet Lithography
- Fine Pattern Replication Using ETS-1 Three-Aspherical Mirror Imaging System
- Fabrication of Aspherical Mirrors for Extreme Ultra-Violet Lithography (EUVL) Using Deposition Techniques
- A Novel Design of Three-Aspherical-Mirror Imaging Optics for Extreme Ultra-Violet Lithography
- Study on Critical Dimension of Printable Phase Defects Using an Extreme Ultraviolet Microscope: II. Definition of Printable Threshold Region for Hole-Pit Programmed Defects
- Control of Roughness in Mo/Al Multilayer Film Fabricated by DC Magnetron Sputtering
- A Novel Design of Three-Aspherical-Mirror Imaging Optics for Extreme Ultra-Violet Lithography
- Evaluating the Optical Index of Ta and Ta-Based Absorbers for an Extreme Ultraviolet Mask Using Extreme Ultraviolet Reflectometry
- Outgassing Characteristics of Low-Molecular-Weight Resists for Extreme Ultraviolet Lithography
- A Multilayer-Coated Reflection Mirror for Microfabrication
- Optimization of Photoacid Generator in Photoacid Generation-Bonded Resist
- In-situ Contamination Thickness Measurement by Novel Resist Evaluation System at NewSUBARU
- Dual Grating Interferometric Lithography for 22-nm Node
- Development of Low Line Edge Roughness and Highly Sensitive Resist for Extreme Ultraviolet Lithography
- Transmission Grating Fabrication for Replicating Resist Patterns of 20 nm and Below
- Direct Evaluation of Surface Roughness of Substrate and Interfacial Roughness in Molybdenum/Silicon Multilayers Using Extreme Ultraviolet Reflectometer
- Study of Critical Dimensions of Printable Phase Defects Using an Extreme Ultraviolet Microscope
- Phase Defect Observation Using Extreme Ultraviolet Microscope
- Resolution Enhancement of Extreme Ultraviolet Microscope Using an Extreme Ultraviolet Beam Splitter
- Actinic Mask Inspection Using an EUV Microscope —Preparation of a Mirau Interferometer for Phase-Defect Detection—
- Extreme Ultraviolet Resist Development at the University of Hyogo
- Experimental Results Obtained using Extreme Ultraviolet Laboratory Tool at New SUBARU
- Cleaning Characteristics of Contaminated Imaging Optics Using 172 nm Radiation
- Development of Fast-Photospeed Chemically Amplified Resist in Extreme Ultraviolet Lithography
- Reducing off Hydrocarbon Contaminants for EUVL
- Resist Outgassing Characteristics in Extreme Ultraviolet Lithography
- At-Wavelength Extreme Ultraviolet Lithography Mask Observation Using a High-Magnification Objective with Three Multilayer Mirrors
- Development of Nanometer Resolution Focus Detector in Vacuum for Extreme Ultraviolet Microscope