Optimization of Photoacid Generator in Photoacid Generation-Bonded Resist
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概要
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We developed and evaluated a photoacid generator (PAG)-bonded resist, a chemical amplified (CA) resist for decreasing line edge roughness (LER) and increasing sensitivity in extreme ultraviolet lithography (EUVL) and electron beam (EB) lithography. We investigated many samples to find an effective for the PAG-bonded resist. Under EB exposure, the LERs and resolutions of the PAG-bonded resist and PAG-blended resist which uses the same PAG and base polymer were compared. It was confirmed that the LER and resolution of the PAG-bonded resist are better than those of the PAG-blended resist. An LER of 3.5 nm in 75 nm line-and-space (L/S) and a resolution of 25 nm space were achieved. Under EUV exposure, a sensitivity of 5.0 mJ/cm2 was achieved.
- 2008-08-25
著者
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Hayakawa Masamichi
Toyo Gosei Kogyo Co. Ltd. Chiba Jpn
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Kinoshita Hiroo
Laboratory Of Advanced Science And Technology For Industry Himeji Institute Of Technology
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Watanabe Takeo
Laboratory Of Advanced Science And Technology For Industry University Of Hyogo
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Fukushima Yasuyuki
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Koto, Kamigori, Akou-gun, Hyogo 678-1205, Japan
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Ohnishi Ryuji
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Kamigori, Hyogo 678-1205, Japan
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Shiotani Hideaki
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Kamigori, Hyogo 678-1205, Japan
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Endo Yusuke
Toyo Gosei Kogyo Co., Ltd., Inba, Chiba 270-1609, Japan
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Yamanaka Tomotaka
Toyo Gosei Kogyo Co., Ltd., Inba, Chiba 270-1609, Japan
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Yusa Shinichi
Graduate School of Engineering, University of Hyogo, Himeji, Hyogo 671-2201, Japan
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Suzuki Shota
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Kamigori, Hyogo 678-1205, Japan
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Shiotani Hideaki
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Koto, Kamigori, Akou-gun, Hyogo 678-1205, Japan
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Suzuki Shota
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Koto, Kamigori, Akou-gun, Hyogo 678-1205, Japan
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Ohnishi Ryuji
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Koto, Kamigori, Akou-gun, Hyogo 678-1205, Japan
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