Fabrication of Aspherical Mirrors for Extreme Ultra-Violet Lithography (EUVL) Using Deposition Techniques
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概要
- 論文の詳細を見る
Mirrors for the imaging optics of extreme ultra-violet lithography (EUVL) systems require highly precise figure processing. We have examined a method of fabricating the aspherical surfaces by deposition. A film of graded thickness is deposited on a spherical substrate using an RF-plasma-enhanced magnetron sputtering system with a deposition mask. The distribution in thickness of the deposited film is close to the designed value, and the method was shown to be feasible for figuring aspherical surfaces. The deposition films for the method are required to have little surface roughness and low residual stress. We have compared the roughnesses and residual stresses in Mo single layer films and Mo/Si multilayer films used in mirrors for soft X-rays. Both values for Mo/Si multilayers were about one order of magnitude smaller than those for Mo single layer films. The roughness of Mo/Si multilayer films almost satisfies the required value for EUVL optics; however, further study is necessary to diminish the residual stress.
- 社団法人応用物理学会の論文
- 1997-12-30
著者
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Komano H
Tokyo Ohka Kogyo Co. Ltd. Kanagawa Jpn
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Watanabe Toshihide
Atr Adaptive Communications Research Laboratories:(present Address)nhk Science And Technical Researc
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Watanabe T
Department Of Innovative And Engineered Materials Interdisciplinary Graduate School Of Science And E
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KINOSHITA Hiroo
Laboratory of Advanced Science and Technology for Industry, Himeji Institute of Technology
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WATANABE Takeo
Laboratory of Advanced Science and Technology for Industry, Himeji Institute of Technology
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Watanabe T
Laboratory Of Advanced Science And Technology For Industry University Of Hyogo
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Watanabe Takeo
Univ. Hyogo Hyogo Jpn
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Niibe M
Himeji Inst. Technol. Hyogo Jpn
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Niibe Masahito
Himeji Institute Of Technology Laboratory Of Advanced Science And Technology For Industry
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Niibe Masahito
Laboratory Of Advanced Science And Technology For Industry Himeji Institute Of Technology
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Kinoshita H
Laboratory Of Advanced Science And Technology For Industry University Of Hyogo
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Kinoshita Hiroo
Laboratory Of Advanced Science And Technology For Industry Himeji Institute Of Technology
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Watanabe Takeo
Laboratory Of Advanced Science And Technology For Industry University Of Hyogo
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Niibe Masahito
Laboratory of Advanced Science &Technology for Industry, Himeji Institute of Technology
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Watanabe Takayuki
Department of Innovative and Engineered Materials, Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology
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