Separation between Surface Adsorption and Reaction of NH_3 on Si (100) by Flash Heating
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概要
- 論文の詳細を見る
Separation between surface adsorption and reaction in atomic-layer nitridation of Si (100) in an NH_3 environment (50-500 Pa) has been investigated by flash heating using an ultraclean low-pressure cold-wall reactor system. The N atom concentration (n_N) on Si (100) at 400℃ initially increases with flash heating by light irradiation of 60J/cm^2 per shot and then tends to saturate at a certain value (〜2.7×10^<15>cm^<-2>). It has been observed that in nitridation with flash heating, a Langmuir-type physical adsorption layer is formed on Si (100), similar to thermal nitridation without flash heating, and reacts at a certain rate. The physically adsorbed NH_3 coverage is the same for both cases with and without flash heating. The flash heating markedly increases the reaction efficiency of physically adsorbed NH_3 as well as the saturation value of n_N. The bonding characteristics observed by X-ray photoelectron spectroscopy in the cases with and without flash heating were almost similar when n_N was the same.
- 社団法人応用物理学会の論文
- 1999-01-30
著者
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Watanabe Takeshi
Laboratory Of Fish Nutrition Department Of Marine Biosciences Tokyo University Of Marine Sciences An
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松浦 孝
東北大学電気通信研究所超高密度・高速知能システム実験施設
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室田 淳一
東北大学
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室田 淳一
東北大学 電気通信研究所
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Watanabe Toshihide
Atr Adaptive Communications Research Laboratories:(present Address)nhk Science And Technical Researc
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Matsuura T
Hokkaido Univ. Education Hakodate Jpn
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Matsuura Takashi
Laboratory For Electronic Intelligent Systems Research Institute Of Electrical Communication Tohoku
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Watanabe T
Department Of Innovative And Engineered Materials Interdisciplinary Graduate School Of Science And E
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Sakuraba Masao
Laboratory For Electronic Intelligent Systems Research Institute Of Electrical Communication Tohoku
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Watanabe T
Laboratory Of Advanced Science And Technology For Industry University Of Hyogo
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Watanabe Takeo
Univ. Hyogo Hyogo Jpn
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Murota Junichi
Laboratory For Microelectronics Research Institute Of Electrical Communication Tohoku University
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Murota Junichi
Laboratory For Electronic Intelligent Systems Research Institute Of Electrical Communication Tohoku
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Watanabe Takeshi
Laboratory Of Fish Nutrition Department Of Aquatic Biosciences Tokyo University Of Fisheries
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Watanabe Takayuki
Department of Innovative and Engineered Materials, Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology
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